apply abort metrology when specific sub modes are selected
This commit is contained in:
Infineon\StieberD
@ -42,7 +42,7 @@ Function Reactor_Log_Actions(Action, CalcColName, FSList, Handle, Name, FMC, Rec
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#pragma precomp SRP_PreCompiler
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$Insert LOGICAL
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$Insert APP_INSERTS
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$Insert FILE.SYSTEM.EQUATES
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$Insert ACTION_SETUP
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$Insert RDS_EQUATES
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@ -56,10 +56,11 @@ $Insert REACTOR_EQUATES
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$Insert WO_MAT_EQUATES
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$Insert WO_MAT_QA_EQUATES
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equ WOCust$ to 2
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Equ WOCust$ to 2
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Equ Comma$ to ','
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Declare function Error_Services, Database_Services, Logging_Services, Environment_Services
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Declare subroutine Error_Services, Database_Services, Logging_Services, Set_Status, Reactor_Log_Services
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Declare subroutine Error_Services, Database_Services, Logging_Services, Set_Status, Reactor_Log_Services, Rds_Services
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If KeyID then GoSub Initialize_System_Variables
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@ -163,95 +164,44 @@ WRITE_RECORD_PRE:
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end
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RdsKeys = Record<REACTOR_LOG_WAFERS_REMOVED_RDS$>
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Swap @VM with @FM in RdsKeys
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If (Not(OrigWafersRemoved)) and (NewWafersRemoved EQ True$) and (ReactNo NE '') and (RdsKeys NE '') then
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ReactorConfigKey = 'WO_DAILY_SCHED':ReactNo
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WoNo = Field(Xlate('CONFIG', ReactorConfigKey, WOCust$, 'X'), ' ', 1)
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CurrentRds = ''
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For idx = 1 to Len(RdsKeys)
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CurrentRds = RdsKeys<idx>
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// Set a flag on the CI record indicating the run was aborted
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CleanInspKey = Xlate('RDS', CurrentRds, 'LWI_CI_NO', 'X')
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CIRec = Database_Services('ReadDataRow', 'CLEAN_INSP', CleanInspKey)
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CIRec<CLEAN_INSP_WAFERS_REMOVED$> = True$
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Database_Services('WriteDataRow', 'CLEAN_INSP', CleanInspKey, CIRec, True$, False$, False$)
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// Change the QA metrology requirements to all wafers
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CassNo = Xlate('RDS', CurrentRds, 'CASS_NO', 'X')
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WoMatQaKey = WoNo : '*' : CassNo
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WoMatQaRec = Xlate('WO_MAT_QA', WoMatQaKey, '', 'X')
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WoWaferQty = Xlate('WO_MAT', WoMatQaKey, WO_MAT_WAFER_QTY$, 'X')
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WoMatQaStages = WoMatQaRec<WO_MAT_QA_STAGE$>
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Swap @VM with @FM in WoMatQaStages
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WoMatQaProfiles = WoMatQaRec<WO_MAT_QA_PROFILE$>
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Swap @VM with @FM in WoMatQaProfiles
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WoMatQaSlots = WoMatQaRec<WO_MAT_QA_SLOT$>
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Swap @VM with @FM in WoMatQaSlots
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WoMatQaWfrQtys = WoMatQaRec<WO_MAT_QA_WFR_QTY$>
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Swap @VM with @FM in WoMatQaWfrQtys
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WoMatQaProps = WoMatQaRec<WO_MAT_QA_PROP$>
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Swap @VM with @FM in WoMatQaProps
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WoMatQaToolClasses = WoMatQaRec<WO_MAT_QA_TOOL_CLASS$>
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Swap @VM with @FM in WoMatQaToolClasses
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WoMatQaRecipes = WoMatQaRec<WO_MAT_QA_RECIPE$>
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Swap @VM with @FM in WoMatQaRecipes
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WoMatQaRecipePatterns = WoMatQaRec<WO_MAT_QA_RECIPE_PATTERN$>
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Swap @VM with @FM in WoMatQaRecipePatterns
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WoMatQaMin = WoMatQaRec<WO_MAT_QA_MIN$>
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Swap @VM with @FM in WoMatQaMin
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WoMatQaMax = WoMatQaRec<WO_MAT_QA_MAX$>
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Swap @VM with @FM in WoMatQaMax
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WoMatQaOOS = WoMatQaRec<WO_MAT_QA_OUT_OF_SPEC$>
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Swap @VM with @FM in WoMatQaOOS
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StageCount = DCount(WoMatQaStages, @FM)
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For stageIdx = 1 to StageCount
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If (WoMatQaStages<stageIdx> _EQC 'QA') and (WoMatQaProfiles<stageIdx> _EQC '1ADE') then
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Slot = WoMatQaSlots<stageIdx>
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If (Slot _NEC 'L') then
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WoMatQaSlots<stageIdx> = 'A'
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WoMatQaWfrQtys<stageIdx> = WoWaferQty
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end
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If (Slot _EQC 'L') then
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WoMatQaStages<stageIdx> = ''
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WoMatQaProfiles<stageIdx> = ''
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WoMatQaSlots<stageIdx> = ''
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WoMatQaWfrQtys<stageIdx> = ''
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WoMatQaProps<stageIdx> = ''
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WoMatQaToolClasses<stageIdx> = ''
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WoMatQaRecipes<stageIdx> = ''
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WoMatQaRecipePatterns<stageIdx> = ''
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WoMatQaMin<stageIdx> = ''
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WoMatQaMax<stageIdx> = ''
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WoMatQaOOS<stageIdx> = ''
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end
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end
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Next stageIdx
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Swap @FM with @VM in WoMatQaStages
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WoMatQaRec<WO_MAT_QA_STAGE$> = WoMatQaStages
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Swap @FM with @VM in WoMatQaProfiles
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WoMatQaRec<WO_MAT_QA_PROFILE$> = WoMatQaProfiles
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Swap @FM with @VM in WoMatQaSlots
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WoMatQaRec<WO_MAT_QA_SLOT$> = WoMatQaSlots
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Swap @FM with @VM in WoMatQaWfrQtys
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WoMatQaRec<WO_MAT_QA_WFR_QTY$> = WoMatQaWfrQtys
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Swap @FM with @VM in WoMatQaProps
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WoMatQaRec<WO_MAT_QA_PROP$> = WoMatQaProps
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Swap @FM with @VM in WoMatQaToolClasses
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WoMatQaRec<WO_MAT_QA_TOOL_CLASS$> = WoMatQaToolClasses
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Swap @FM with @VM in WoMatQaRecipes
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WoMatQaRec<WO_MAT_QA_RECIPE$> = WoMatQaRecipes
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Swap @FM with @VM in WoMatQaRecipePatterns
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WoMatQaRec<WO_MAT_QA_RECIPE_PATTERN$> = WoMatQaRecipePatterns
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Swap @FM with @VM in WoMatQaMin
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WoMatQaRec<WO_MAT_QA_MIN$> = WoMatQaMin
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Swap @FM with @VM in WoMatQaMax
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WoMatQaRec<WO_MAT_QA_MAX$> = WoMatQaMax
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Swap @FM with @VM in WoMatQaOOS
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WoMatQaRec<WO_MAT_QA_OUT_OF_SPEC$> = WoMatQaOOS
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Database_Services('WriteDataRow', 'WO_MAT_QA', WoMatQaKey, WoMatQaRec, True$, False$, False$)
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Next idx
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LogPath = Environment_Services('GetApplicationRootPath') : '\LogFiles\ReactorLog'
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LogDate = Oconv(Date(), 'D4/')
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LogTime = Oconv(Time(), 'MTS')
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LogFileName = LogDate[7, 4] : '-' : LogDate[1, 2] : '-' : LogDate[4, 2] : 'Wafers Removed Log.csv'
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Headers = 'Logging DTM' : @FM : 'ReactorNo' : @FM : 'Notes'
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objLog = Logging_Services('NewLog', LogPath, LogFileName, CRLF$, Comma$, Headers, '', False$, False$, True$)
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LoggingDTM = LogDate : ' ' : LogTime ; // Logging DTM
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// Log metrology modification attempt
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Swap @VM with ',' in RdsKeys
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LogData = ''
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LogData<1> = LoggingDtm
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LogData<2> = ReactNo
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LogData<3> = 'Wafers removed from reactor, ReactorLog ':Name:'. Attempting to apply abort metrology on RdsKeys ':RdsKeys:'.'
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Logging_Services('AppendLog', objLog, LogData, @RM, @FM)
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Swap ',' with @FM in RdsKeys
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Rds_Services('ApplyAbortMetrology', RdsKeys)
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If Error_Services('HasError') then
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// Log failure
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ErrorMsg = Error_Services('GetMessage')
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LogData = ''
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LogData<1> = LoggingDtm
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LogData<2> = ReactNo
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LogData<3> = 'Error applying abort metrology. Error message: ':ErrorMsg
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Logging_Services('AppendLog', objLog, LogData, @RM, @FM)
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end else
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// Log success
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LogData = ''
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LogData<1> = LoggingDtm
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LogData<2> = ReactNo
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LogData<3> = 'Successfully applied abort metrology'
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Logging_Services('AppendLog', objLog, LogData, @RM, @FM)
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end
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end
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return
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@ -373,9 +323,11 @@ return
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////////////////////////////////////////////////////////////////////////////////////////////////////////////////////////
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ClearCursors:
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For counter = 0 to 8
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ClearSelect counter
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Next counter
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return
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@ -427,14 +379,3 @@ Restore_System_Variables:
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return
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