COMPILE INSERT Recipe_Parms_Equ

* Equates for obj_Recipe return data structure

EQU RP_DEPOSIT_TIME_MIN$ TO 1
EQU RP_DEPOSIT_TIME_MAX$ TO 2
EQU RP_DILUENT_FLOW_MIN$ TO 3
EQU RP_DILUENT_FLOW_MAX$ TO 4
EQU RP_DOPANT_FLOW_MIN$  TO 5
EQU RP_DOPANT_FLOW_MAX$  TO 6
EQU RP_HCL_FLOW_MIN$     TO 7
EQU RP_HCL_FLOW_MAX$     TO 8
EQU RP_BAKE_TIME_MIN$    TO 9
EQU RP_BAKE_TIME_MAX$    TO 10
EQU RP_H2_FLOW_MIN$      TO 11
EQU RP_H2_FLOW_MAX$      TO 12
EQU RP_TCS_FLOW_MIN$     TO 13
EQU RP_TCS_FLOW_MAX$     TO 14
EQU RP_DCS_FLOW_MIN$     TO 15
EQU RP_DCS_FLOW_MAX$     TO 16
EQU RP_AUX1_FLOW_MIN$    TO 17
EQU RP_AUX1_FLOW_MAX$    TO 18
EQU RP_AUX2_FLOW_MIN$    TO 19
EQU RP_AUX2_FLOW_MAX$    TO 20
EQU RP_FOFFSET_MIN$      TO 21
EQU RP_FOFFSET_MAX$      TO 22
EQU RP_SOFFSET_MIN$      TO 23
EQU RP_SOFFSET_MAX$      TO 24
EQU RP_ROFFSET_MIN$      TO 25
EQU RP_ROFFSET_MAX$      TO 26
EQU RP_ETCH1_MIN$        TO 27
EQU RP_ETCH1_MAX$        TO 28
EQU RP_ETCH2_MIN$        TO 29
EQU RP_ETCH2_MAX$        TO 30
EQU RP_DOPANT$           TO 31
EQU RP_EPI_DILUENT$      TO 32
EQU RP_SUSC_ETCH_MIN$    TO 33
EQU RP_SUSC_ETCH_MAX$    TO 34
EQU RP_UL_TEMP_MIN$      TO 35
EQU RP_UL_TEMP_MAX$      TO 36
EQU RP_ETCH3_MIN$        TO 37
EQU RP_ETCH3_MAX$        TO 38

