5162 lines
136 KiB
JSON
5162 lines
136 KiB
JSON
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|
|
"spec_thick_mtool": "FTIR",
|
|
"spec_thick_mrecipe": "EpiPro9pt/6in_9pt",
|
|
"spec_res_mtool": "HgCv",
|
|
"spec_res_mrecipe": "6IN5pt_N.SET",
|
|
"spec_cres_mtool": "",
|
|
"spec_cres_mrecipe": "",
|
|
"ci_no": 2508187,
|
|
"spec_clean_tool": null,
|
|
"mv_no": 1,
|
|
"scan_tool": "TENCOR3",
|
|
"spec_surfscan_recipe": "EPISIL",
|
|
"spec_ss_samp_qty": 3
|
|
},
|
|
{
|
|
"reactor_type": "P",
|
|
"reactor": 70,
|
|
"ls_id": "L2",
|
|
"zone": "2",
|
|
"load_lock_side": "L",
|
|
"rds_no": 548716,
|
|
"ps_no": "3708",
|
|
"recipe_name": "Phosphorus",
|
|
"recipe_no": 960,
|
|
"spec_type": "Production",
|
|
"spec_thick_mtool": "FTIR",
|
|
"spec_thick_mrecipe": "EpiPro9pt/6in_9pt",
|
|
"spec_res_mtool": "HgCv",
|
|
"spec_res_mrecipe": "6IN5pt_N.SET",
|
|
"spec_cres_mtool": "",
|
|
"spec_cres_mrecipe": "",
|
|
"ci_no": 2508187,
|
|
"spec_clean_tool": null,
|
|
"mv_no": 2,
|
|
"scan_tool": null,
|
|
"spec_surfscan_recipe": "EPISIL_100",
|
|
"spec_ss_samp_qty": 6
|
|
}
|
|
] |