{ "Ifl2BoAssociation": [ { "id": 18454, "properties": { "id": 18454, "direction": "SECOND_TO_FIRST" }, "relations": { "businessObject": [ 10129 ], "informationFlow": [ 18453 ] } }, { "id": 76415, "properties": { "lastModificationTime": "2022-10-06T11:07:38.000Z", "lastModificationUser": "Sebastian Huette (huette)", "id": 76415, "direction": "NO_DIRECTION" }, "relations": { "businessObject": [ 21255 ], "informationFlow": [ 76411 ] } } ], "BusinessMapping": [ { "id": 33928, "properties": { "lastModificationTime": "2023-08-29T14:32:44.586Z", "lastModificationUser": "Dmitry Kerbelev (kerbelev)", "id": 33928 }, "relations": { "informationSystem": [ 4449 ], "itService": [ 13944 ] } }, { "id": 33927, "properties": { "lastModificationTime": "2023-08-29T14:32:44.586Z", "lastModificationUser": "Dmitry Kerbelev (kerbelev)", "id": 33927 }, "relations": { "informationSystem": [ 4449 ], "itService": [ 13128 ] } } ], "Tc2IflAssociation": [ { "id": 73190, "properties": { "lastModificationTime": 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"id": 61969 }, "relations": { "informationFlow": [ 18453 ], "technicalComponent": [ 61824 ] } }, { "id": 84818, "properties": { "lastModificationTime": "2023-07-27T11:52:36.000Z", "lastModificationUser": "Thomas Giegold (giegold)", "id": 84818 }, "relations": { "informationFlow": [ 84817 ], "technicalComponent": [ 1161 ] } }, { "id": 75060, "properties": { "lastModificationTime": "2023-02-02T13:16:56.000Z", "lastModificationUser": "Thomas Giegold (giegold)", "id": 75060 }, "relations": { "informationFlow": [ 75059 ], "technicalComponent": [ 75043 ] } }, { "id": 39957, "properties": { "lastModificationTime": "2022-10-21T07:11:48.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 39957 }, "relations": { "informationFlow": [ 17156 ], "technicalComponent": [ 877 ] } }, { "id": 50197, "properties": { "lastModificationTime": "2019-05-10T16:26:32.000Z", "lastModificationUser": "Thomas Giegold (giegold)", "id": 50197 }, "relations": { "informationFlow": [ 50196 ], "technicalComponent": [ 917 ] } }, { "id": 75063, "properties": { "lastModificationTime": "2023-02-02T13:16:56.000Z", "lastModificationUser": "Thomas Giegold (giegold)", "id": 75063 }, "relations": { "informationFlow": [ 75059 ], "technicalComponent": [ 917 ] } }, { "id": 50199, "properties": { "lastModificationTime": "2020-02-14T08:42:56.000Z", "lastModificationUser": "Michal Klima (klimmich)", "id": 50199 }, "relations": { "informationFlow": [ 50196 ], "technicalComponent": [ 5762 ] } }, { "id": 61501, "properties": { "lastModificationTime": "2022-08-16T14:17:28.000Z", "lastModificationUser": "Christian Kuempel (kuempel)", "id": 61501 }, "relations": { "informationFlow": [ 61500 ], "technicalComponent": [ 1161 ] } }, { "id": 84831, "properties": { "lastModificationTime": "2023-07-27T12:05:41.000Z", "lastModificationUser": "Thomas Giegold (giegold)", "id": 84831 }, "relations": { "informationFlow": [ 84830 ], "technicalComponent": [ 1161 ] } }, { "id": 76414, "properties": { "lastModificationTime": "2022-10-06T11:08:28.000Z", "lastModificationUser": "Sebastian Huette (huette)", "id": 76414 }, "relations": { "informationFlow": [ 76411 ], "technicalComponent": [ 1161 ] } } ], "Ifl2ProjAssociation": [ { "id": 84097, "properties": { "lastModificationTime": "2023-07-03T14:31:21.000Z", "lastModificationUser": "Siong Boon Ong (ongsiong)", "SCM - Impact Type": "Not Impacted", "id": 84097 }, "relations": { "project": [ 83654 ], "informationFlow": [ 76411 ] } }, { "id": 84079, "properties": { "lastModificationTime": "2023-07-03T14:32:35.000Z", "lastModificationUser": "Siong Boon Ong (ongsiong)", "SCM - Impact Type": "Not Impacted", "id": 84079 }, "relations": { "project": [ 83654 ], "informationFlow": [ 18011 ] } } ], "Ifl2Is1Association": [ { "id": 84837, "properties": { "lastModificationTime": "2023-07-27T12:05:50.000Z", "lastModificationUser": "Thomas Giegold (giegold)", "id": 84837 }, "relations": { "informationSystem": [ 84829 ], "informationFlow": [ 84830 ] } }, { "id": 37956, "properties": { "lastModificationTime": "2022-10-21T07:11:48.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 37956 }, "relations": { "informationSystem": [ 17153 ], "informationFlow": [ 17156 ] } }, { "id": 73191, "properties": { "lastModificationTime": "2022-07-13T10:14:25.000Z", "lastModificationUser": "Christof Kanitz (kanitz)", "id": 73191 }, "relations": { "informationSystem": [ 5676 ], "informationFlow": [ 73189 ] } }, { "id": 76917, "properties": { "lastModificationTime": "2022-10-21T07:08:03.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 76917 }, "relations": { "informationSystem": [ 16134 ], "informationFlow": [ 18453 ] } }, { "id": 84820, "properties": { "lastModificationTime": "2023-07-27T11:53:13.000Z", "lastModificationUser": "Thomas Giegold (giegold)", "id": 84820 }, "relations": { "informationSystem": [ 84816 ], "informationFlow": [ 84817 ] } }, { "id": 50198, "properties": { "lastModificationTime": "2021-10-07T04:20:59.000Z", "lastModificationUser": "Hiew Ming Chan (chanhiew)", "id": 50198 }, "relations": { "informationSystem": [ 50189 ], "informationFlow": [ 50196 ] } }, { "id": 84854, "properties": { "lastModificationTime": "2023-07-27T12:08:57.000Z", "lastModificationUser": "Thomas Giegold (giegold)", "id": 84854 }, "relations": { "informationSystem": [ 84843 ], "informationFlow": [ 84844 ] } }, { "id": 75062, "properties": { "lastModificationTime": "2023-02-02T13:16:56.000Z", "lastModificationUser": "Thomas Giegold (giegold)", "id": 75062 }, "relations": { "informationSystem": [ 75045 ], "informationFlow": [ 75059 ] } }, { "id": 38107, "properties": { "lastModificationTime": "2022-09-15T14:48:48.000Z", "lastModificationUser": "Thomas Giegold (giegold)", "id": 38107 }, "relations": { "informationSystem": [ 15728 ], "informationFlow": [ 17930 ] } }, { "id": 76413, "properties": { "lastModificationTime": "2022-10-06T11:08:28.000Z", "lastModificationUser": "Sebastian Huette (huette)", "id": 76413 }, "relations": { "informationSystem": [ 72962 ], "informationFlow": [ 76411 ] } }, { "id": 38141, "properties": { "lastModificationTime": "2023-05-09T11:47:40.000Z", "lastModificationUser": "Sebastian Huette (huette)", "id": 38141 }, "relations": { "informationSystem": [ 4754 ], "informationFlow": [ 18011 ] } }, { "id": 61503, "properties": { "lastModificationTime": "2023-06-05T12:41:09.000Z", "lastModificationUser": "Martin Hardes (hardesm)", "id": 61503 }, "relations": { "informationSystem": [ 12633 ], "informationFlow": [ 61500 ] } }, { "id": 54751, "properties": { "lastModificationTime": "2022-09-22T07:51:55.000Z", "lastModificationUser": "Simon Florian Weger (wegersim)", "id": 54751 }, "relations": { "informationSystem": [ 4720 ], "informationFlow": [ 54749 ] } } ], "Is2IsdAssociation": [ { "id": 46192, "properties": { "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 46192 }, "relations": { "informationSystemDomain": [ 45100 ], "informationSystem": [ 4449 ] } }, { "id": 79475, "properties": { "lastModificationTime": "2023-04-14T13:57:29.000Z", "lastModificationUser": "Rainer Helmut Glas (glas)", "id": 79475 }, "relations": { "informationSystemDomain": [ 79464 ], "informationSystem": [ 4449 ] } }, { "id": 56835, "properties": { "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 56835 }, "relations": { "informationSystemDomain": [ 45126 ], "informationSystem": [ 4449 ] } }, { "id": 59044, "properties": { "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 59044 }, "relations": { "informationSystemDomain": [ 59009 ], "informationSystem": [ 4449 ] } }, { "id": 70020, "properties": { "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 70020 }, "relations": { "informationSystemDomain": [ 70012 ], "informationSystem": [ 4449 ] } }, { "id": 45397, "properties": { "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 45397 }, "relations": { "informationSystemDomain": [ 45094 ], "informationSystem": [ 4449 ] } }, { "id": 45879, "properties": { "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 45879 }, "relations": { "informationSystemDomain": [ 45117 ], "informationSystem": [ 4449 ] } }, { "id": 45579, "properties": { "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 45579 }, "relations": { "informationSystemDomain": [ 45116 ], "informationSystem": [ 4449 ] } }, { "id": 70413, "properties": { "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 70413 }, "relations": { "informationSystemDomain": [ 70290 ], "informationSystem": [ 4449 ] } }, { "id": 46092, "properties": { "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 46092 }, "relations": { "informationSystemDomain": [ 45101 ], "informationSystem": [ 4449 ] } }, { "id": 45183, "properties": { "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 45183 }, "relations": { "informationSystemDomain": [ 45098 ], "informationSystem": [ 4449 ] } } ], "Is2BdAssociation": [ { "id": 58878, "properties": { "EA - Impact Ranking": 3.00, "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 58878 }, "relations": { "informationSystem": [ 4449 ], "businessDomain": [ 58876 ] } } ], "InformationFlow": [ { "id": 17156, "properties": { "lastModificationTime": "2022-10-21T07:11:48.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "$$hierarchy_level$$": 1, "interfaceDirection": "SECOND_TO_FIRST", "name": "MSP Data Mart <- APC Trend ID#17156", "description": { "plain": "retrieves regularly (scheduled, ca. 1h) processed and loaded lot level visual inspection data from FDC", "translated": "
retrieves regularly (scheduled, ca. 1h) processed and loaded lot level visual inspection data from FDC
" }, "id": 17156, "position": 709, "Roadmap Ranking": "Target", "Mission Criticality": "C - Medium" }, "relations": { "informationSystem1Associations": [ 37956 ], "technicalComponentAssociations": [ 39957 ], "informationSystem2Associations": [ 39256 ] } }, { "id": 73189, "properties": { "lastModificationTime": "2022-04-11T09:28:50.000Z", "lastModificationUser": "Christof Kanitz (kanitz)", "$$hierarchy_level$$": 1, "interfaceDirection": "SECOND_TO_FIRST", "name": "WAC <- APC Trend ID#73189", "description": { "plain": "Retrieving detailed APC Violation data from APC", "translated": "Retrieving detailed APC Violation data from APC
" }, "id": 73189, "position": 2486, "Roadmap Ranking": "Target", "Mission Criticality": "A - Critical", "Information Flow Details": { "plain": "Using Stored Procedures on APC Trend DB", "translated": "Using Stored Procedures on APC Trend DB
" } }, "relations": { "informationSystem1Associations": [ 73191 ], "technicalComponentAssociations": [ 73190 ], "informationSystem2Associations": [ 73192 ] } }, { "id": 17930, "properties": { "lastModificationTime": "2022-09-15T14:48:48.000Z", "lastModificationUser": "Thomas Giegold (giegold)", "$$hierarchy_level$$": 1, "interfaceDirection": "FIRST_TO_SECOND", "name": "TEDOM -> APC Trend ID#17930", "description": { "plain": "writes PDSF files on file share, which is used as Input Directory of the APC Extractor", "translated": "writes PDSF files on file share, which is used as Input Directory of the APC Extractor
" }, "id": 17930, "position": 842, "Roadmap Ranking": "Shutdown", "Mission Criticality": "A - Critical" }, "relations": { "informationSystem1Associations": [ 38107 ], "informationSystem2Associations": [ 39407 ] } }, { "id": 84844, "properties": { "lastModificationTime": "2023-07-27T13:00:33.000Z", "lastModificationUser": "Plugin API (PluginAPI)", "$$hierarchy_level$$": 1, "interfaceDirection": "FIRST_TO_SECOND", "name": "ESL2APC -> APC Trend ID#84844", "description": { "plain": "Emhanced Status Log from Prober are converted into PDSF files ad sent to APC Trend for loading (1x per day).", "translated": "Emhanced Status Log from Prober are converted into PDSF files ad sent to APC Trend for loading (1x per day).
" }, "id": 84844, "position": 3070, "Roadmap Ranking": "Target", "Mission Criticality": "C - Medium" }, "relations": { "informationSystem1Associations": [ 84854 ], "technicalComponentAssociations": [ 84846 ], "informationSystem2Associations": [ 84845 ] } }, { "id": 84817, "properties": { "lastModificationTime": "2023-07-27T12:00:33.000Z", "lastModificationUser": "Plugin API (PluginAPI)", "$$hierarchy_level$$": 1, "interfaceDirection": "FIRST_TO_SECOND", "name": "WT ADP Converter -> APC Trend ID#84817", "description": { "plain": "PDSF files from Wafer Test area are written to APC Trend POLLPATH for data processing", "translated": "PDSF files from Wafer Test area are written to APC Trend POLLPATH for data processing
" }, "id": 84817, "position": 3068, "Roadmap Ranking": "Target", "Mission Criticality": "C - Medium" }, "relations": { "informationSystem1Associations": [ 84820 ], "technicalComponentAssociations": [ 84818 ], "informationSystem2Associations": [ 84819 ] } }, { "id": 75059, "properties": { "Valid From-To": "2022-08-30;", "lastModificationTime": "2023-02-02T15:13:05.000Z", "lastModificationUser": "Plugin API (PluginAPI)", "$$hierarchy_level$$": 1, "interfaceDirection": "SECOND_TO_FIRST", "name": "Restricted Lake <- APC Trend ID#75059", "description": { "plain": "Load daily all new APC data (event, trace, alarm data, limits, limit violations) into the WBG lake for all relevant products; additionally the user permissions are loaded intoRanger (Hadoop App) to set up the secure data handling of the APC data in the restricted data lake.", "translated": "Load daily all new APC data (event, trace, alarm data, limits, limit violations) into the WBG lake for all relevant products; additionally the user permissions are loaded intoRanger (Hadoop App) to set up the secure data handling of the APC data in the restricted data lake.
" }, "id": 75059, "position": 2610, "Roadmap Ranking": "Planned", "Mission Criticality": "C - Medium" }, "relations": { "informationSystem1Associations": [ 75062 ], "technicalComponentAssociations": [ 75063, 75060 ], "informationSystem2Associations": [ 75061 ] } }, { "id": 50196, "properties": { "lastModificationTime": "2019-05-17T17:07:07.000Z", "lastModificationUser": "- - (PluginAPI)", "$$hierarchy_level$$": 1, "interfaceDirection": "SECOND_TO_FIRST", "name": "Machine Alarm Management Report <- APC Trend ID#50196", "description": { "plain": "Alarm data are retrieved from a FDC DB view (of all local FDC instances) once a day\nSince interface needs to be replaced as soon as the central FDC instance is available", "translated": "Alarm data are retrieved from a FDC DB view (of all local FDC instances) once a day
Since interface needs to be replaced as soon as the central FDC instance is available
APC Trend sends online reaction violation to Twin Adapter via Exception Management. There is no direct information flow between APC Trend & Twin Adapter
" }, "id": 18453, "position": 985, "Roadmap Ranking": "Target", "Mission Criticality": "A - Critical" }, "relations": { "businessObjectAssociations": [ 18454 ], "informationSystem1Associations": [ 76917 ], "technicalComponentAssociations": [ 61969, 40648 ], "informationSystem2Associations": [ 39585 ] } }, { "id": 76411, "properties": { "lastModificationTime": "2022-10-06T13:00:29.000Z", "lastModificationUser": "Plugin API (PluginAPI)", "$$hierarchy_level$$": 1, "interfaceDirection": "FIRST_TO_SECOND", "name": "EDA BE Integration -> APC Trend ID#76411", "description": { "plain": "Store PDSF files for APC trend, these files will be transfered from the PDSF file location via the extractor into APC Trend", "translated": "Store PDSF files for APC trend, these files will be transfered from the PDSF file location via the extractor into APC Trend
" }, "id": 76411, "position": 2674, "Roadmap Ranking": "Target", "Mission Criticality": "C - Medium" }, "relations": { "businessObjectAssociations": [ 76415 ], "informationSystem1Associations": [ 76413 ], "technicalComponentAssociations": [ 76414 ], "projectAssociations": [ 84097 ], "informationSystem2Associations": [ 76412 ] } }, { "id": 18011, "properties": { "lastModificationTime": "2020-07-17T07:10:18.000Z", "lastModificationUser": "Sebastian Huette (huette)", "$$hierarchy_level$$": 1, "interfaceDirection": "BOTH_DIRECTIONS", "name": "Exception Management <-> APC Trend ID#18011", "description": { "plain": "FDC violations are sent from APC Trend to the Exception Management to trigger the proper exception handling workflow; EM also clears violation messages in APC after the confirmation is done via the UI\n[[FactoryAutomation\\TriggerOCAP>>http://ifxapiviewer.vih.infineon.com/?dbindex=1&service=4176]]", "translated": "FDC violations are sent from APC Trend to the Exception Management to trigger the proper exception handling workflow; EM also clears violation messages in APC after the confirmation is done via the UI
FactoryAutomation\\TriggerOCAP
Sending APC data via PDSF file
" }, "id": 61500, "position": 1948, "Roadmap Ranking": "Non-Target", "Mission Criticality": "A - Critical" }, "relations": { "informationSystem1Associations": [ 61503 ], "technicalComponentAssociations": [ 61501 ], "informationSystem2Associations": [ 61502 ] } }, { "id": 54749, "properties": { "lastModificationTime": "2022-09-22T07:51:55.000Z", "lastModificationUser": "Simon Florian Weger (wegersim)", "$$hierarchy_level$$": 1, "interfaceDirection": "SECOND_TO_FIRST", "name": "FabCockpit <- APC Trend ID#54749", "description": { "plain": "equipment alert events received", "translated": "equipment alert events received
" }, "id": 54749, "position": 1534, "Roadmap Ranking": "Non-Target", "Mission Criticality": "A - Critical" }, "relations": { "informationSystem1Associations": [ 54751 ], "informationSystem2Associations": [ 54750 ] } }, { "id": 84830, "properties": { "lastModificationTime": "2023-07-27T13:00:33.000Z", "lastModificationUser": "Plugin API (PluginAPI)", "$$hierarchy_level$$": 1, "interfaceDirection": "FIRST_TO_SECOND", "name": "PDSF Creator -> APC Trend ID#84830", "description": { "plain": "PDSF files from Prober are sent to APC Trend (every 10min)", "translated": "PDSF files from Prober are sent to APC Trend (every 10min)
" }, "id": 84830, "position": 3069, "Roadmap Ranking": "Target", "Mission Criticality": "C - Medium" }, "relations": { "informationSystem1Associations": [ 84837 ], "technicalComponentAssociations": [ 84831 ], "informationSystem2Associations": [ 84832 ] } } ], "Is2ProjAssociation": [ { "id": 84073, "properties": { "lastModificationTime": "2023-07-02T10:05:54.000Z", "lastModificationUser": "Siong Boon Ong (ongsiong)", "SCM - Impact Type": "Not Impacted", "id": 84073 }, "relations": { "informationSystem": [ 4449 ], "project": [ 83654 ] } }, { "id": 83434, "properties": { "lastModificationTime": "2023-06-20T14:12:33.000Z", "lastModificationUser": "Thomas Giegold (giegold)", "id": 83434 }, "relations": { "informationSystem": [ 4449 ], "project": [ 83326 ] } } ], "Is2TcAssociation": [ { "id": 53890, "properties": { "lastModificationTime": "2023-07-19T11:00:48.000Z", "lastModificationUser": "Erich Otto Pintar (pintar)", "id": 53890 }, "relations": { "informationSystem": [ 4449 ], "technicalComponent": [ 16330 ] } }, { "id": 33091, "properties": { "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 33091 }, "relations": { "informationSystem": [ 4449 ], "technicalComponent": [ 16439 ] } }, { "id": 31812, "properties": { "lastModificationTime": "2023-07-05T06:23:58.000Z", "lastModificationUser": "Mathias Rueck (rueckmat)", "id": 31812 }, "relations": { "informationSystem": [ 4449 ], "technicalComponent": [ 16362 ] } }, { "id": 61988, "properties": { "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 61988 }, "relations": { "informationSystem": [ 4449 ], "technicalComponent": [ 61824 ] } }, { "id": 73221, "properties": { "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 73221 }, "relations": { "informationSystem": [ 4449 ], "technicalComponent": [ 18360 ] } }, { "id": 73220, "properties": { "lastModificationTime": "2023-05-31T07:48:24.000Z", "lastModificationUser": "Sascha Pscheidt (pscheidt)", "Technology Migration State": "In-Production", "id": 73220 }, "relations": { "informationSystem": [ 4449 ], "technicalComponent": [ 17708 ] } }, { "id": 28454, "properties": { "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 28454 }, "relations": { "informationSystem": [ 4449 ], "technicalComponent": [ 917 ] } }, { "id": 32488, "properties": { "lastModificationTime": "2023-06-12T12:24:17.000Z", "lastModificationUser": "Jonas Schrader (schradej)", "id": 32488 }, "relations": { "informationSystem": [ 4449 ], "technicalComponent": [ 16384 ] } }, { "id": 30153, "properties": { "lastModificationTime": "2022-06-22T07:35:07.000Z", "lastModificationUser": "Abinash Ojha (ojha)", "id": 30153 }, "relations": { "informationSystem": [ 4449 ], "technicalComponent": [ 6071 ] } }, { "id": 32041, "properties": { "lastModificationTime": 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APC Trend (BTH),
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APC-FDC Goals
Advanced Process Control in general is a methodology to
- Increase equipment and process stability by using ON-LINE equipment data
- accelerate yield learning by linking these equipment data with product data.
APC-Trend in particular is the SW for the analysis, fault detection, classification and notification based on raw process- and equipment data from internal (e.g. power, temperature) and external (e.g. OES, SEERS) Sensors.
The high level requirements are:
- Generation of keynumbers / information out of raw process- and equipment data (to detect process and equipment problems)
- Data analysis of internal and external Sensors (e.g. OES, SEERS, etc.)
- Visualisation of keynumbers, raw data and logistic information
- Interface to EDA and CIM tools
- Functionality for Tool and Recipe comparison
- Fault detection of process equipment immediately after each run
- Message to process engineer, operator, Interface to MES (Lot/Tool stop), Equipment Integration (Tool stop)
The analysis should done immediately after the run, hence a powerful interface to the equipment integration and high availability is needed.
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