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met08ddupsfs6420/Adaptation/Shared/Metrology/ScopeInfo.cs

409 lines
22 KiB
C#
Raw Blame History

using System;
using System.IO;
namespace Adaptation.Shared.Metrology
{
public class ScopeInfo : IScopeInfo
{
public Test Test { get; private set; }
public Enum Enum { get; private set; }
public string HTML { get; private set; }
public string Title { get; private set; }
public string FileName { get; private set; }
public int TestValue { get; private set; }
public string Header { get; private set; }
public string QueryFilter { get; private set; }
public string FileNameWithoutExtension { get; private set; }
public EquipmentType EquipmentType { get; private set; }
public ScopeInfo(ILogic logic, ConfigDataBase configDataBase, Test test)
{
Enum = test;
Test = test;
TestValue = (int)test;
if (configDataBase.EquipmentConnection is null)
EquipmentType = configDataBase.EquipmentType;
else
EquipmentType = configDataBase.EquipmentConnection.Value;
string eventName = GetEventNameAndSetRemaining();
if (eventName != configDataBase.GetEventName())
{
File.Move(logic.Logistics.ReportFullPath, Path.ChangeExtension(logic.Logistics.ReportFullPath, eventName));
throw new Exception();
}
else if (EquipmentType != configDataBase.EquipmentType && EquipmentType != configDataBase.EquipmentConnection)
{
File.Move(logic.Logistics.ReportFullPath, Path.ChangeExtension(logic.Logistics.ReportFullPath, EquipmentType.ToString()));
throw new Exception();
}
}
public ScopeInfo(ILogic logic, ConfigDataBase configDataBase, Test test, string fileName, string queryFilter, string title = "", string html = "")
{
Enum = test;
Test = test;
TestValue = (int)test;
if (configDataBase.EquipmentConnection is null)
EquipmentType = configDataBase.EquipmentType;
else
EquipmentType = configDataBase.EquipmentConnection.Value;
FileNameWithoutExtension = Path.GetFileNameWithoutExtension(fileName);
Header = string.Empty;
QueryFilter = queryFilter;
Title = title;
HTML = html;
FileName = fileName;
}
public ScopeInfo ShallowCopy()
{
return (ScopeInfo)MemberwiseClone();
}
private string GetEventNameAndSetRemaining()
{
EventName eventName;
switch (Test)
{
case Test.AFMRoughness:
EquipmentType = EquipmentType.MET08AFMD3100;
eventName = EventName.FileRead;
FileNameWithoutExtension = "afm_iqs_01";
Header = string.Empty;
QueryFilter = "AFM Roughness";
Title = "AFM";
HTML = @"GaN Epi Data\10 - afm.html";
break;
case Test.BreakdownVoltageCenter:
EquipmentType = EquipmentType.MET08BVHGPROBE;
eventName = EventName.FileRead;
FileNameWithoutExtension = "bv_iqs_01";
Header = "Reactor;fDate;fRecipeName;Lot;fPocketNumber;g4Scribe;BV Position;BV Value;Tool";
QueryFilter = "Breakdown Voltage";
Title = "Breakdown Voltage-Center";
HTML = @"GaN Epi Data\03 - bv-production.html";
break;
case Test.BreakdownVoltageEdge:
EquipmentType = EquipmentType.MET08BVHGPROBE;
eventName = EventName.FileRead;
FileNameWithoutExtension = "bv_iqs_01_Edge";
Header = "Reactor;fDate;fRecipeName;Lot;fPocketNumber;g4Scribe;BV Position;BV Value;Tool";
QueryFilter = "Breakdown Voltage - Edge";
Title = "Breakdown Voltage-Edge";
HTML = @"GaN Epi Data\03 - bv-production.html";
break;
case Test.BreakdownVoltageMiddle8in:
EquipmentType = EquipmentType.MET08BVHGPROBE;
eventName = EventName.FileRead;
FileNameWithoutExtension = "bv_iqs_01_Middle";
Header = "Reactor;fDate;fRecipeName;Lot;fPocketNumber;g4Scribe;BV Position;BV Value;Tool";
QueryFilter = "Breakdown Voltage - Middle";
Title = "Breakdown Voltage-Middle (8 in)";
HTML = @"GaN Epi Data\03 - bv-production.html";
break;
case Test.CV:
EquipmentType = EquipmentType.MET08CVHGPROBE802B150;
eventName = EventName.FileRead;
FileNameWithoutExtension = "cv_iqs_01";
Header = "Reactor;fDate;fPart;Lot;pocketNumber;g4Scribe;Position;Vp;NdMin;Tool ID;CV Ns;CV Cap";
QueryFilter = "CV_Ns";
Title = "CV";
HTML = @"GaN Epi Data\05 - cv.html";
break;
case Test.MonthlyCV:
EquipmentType = EquipmentType.MET08CVHGPROBE802B150_Monthly;
eventName = EventName.FileReadMonthly;
FileNameWithoutExtension = "cv_iqs_01";
Header = "Reactor;fDate;fPart;Lot;pocketNumber;g4Scribe;Position;Vp;NdMin;Tool ID;CV Ns;CV Cap";
QueryFilter = "CV_Ns";
Title = "CV Monthly Verification";
HTML = @"Metrology\07 - cv_verif_monthly.html";
break;
case Test.WeeklyCV:
EquipmentType = EquipmentType.MET08CVHGPROBE802B150_Weekly;
eventName = EventName.FileReadWeekly;
FileNameWithoutExtension = "cv_iqs_01";
Header = "Reactor;fDate;fPart;Lot;pocketNumber;g4Scribe;Position;Vp;NdMin;Tool ID;CV Ns;CV Cap";
QueryFilter = "CV_Ns";
Title = "CV Weekly Verification";
HTML = @"Metrology\16 - cv_verif_weekly.html";
break;
case Test.CandelaKlarfDC:
EquipmentType = EquipmentType.MET08DDINCAN8620;
eventName = EventName.FileRead;
FileNameWithoutExtension = "candela_iqs_01";
Header = "LotID;OperatorID;RecipeName;CandelaRecipe;WaferID;PocketNumber;RunDate;Epi;SlipLines;Cracks;EpiDef;HazeSpot;SmallLpd;MediumLpd;LargeLpd;Cracks_A;Spirals;Craters;8620 Small;Pits;Tool ID;Defect Count";
QueryFilter = "Candela Cracking";
Title = "Candela";
HTML = @"GaN Epi Data\12 - candela.html";
break;
case Test.CandelaLaser:
EquipmentType = EquipmentType.MET08DDINCAN8620;
eventName = EventName.FileRead;
FileNameWithoutExtension = "candela_iqs_01";
Header = "LotID;OperatorID;RecipeName;CandelaRecipe;WaferID;PocketNumber;RunDate;Epi;SlipLines;Cracks;EpiDef;HazeSpot;SmallLpd;MediumLpd;LargeLpd;Cracks_A;Spirals;Craters;Pits;Tool ID;Defect Count";
QueryFilter = "Candela Cracking";
Title = "Candela";
HTML = @"GaN Epi Data\12 - candela.html";
break;
case Test.CandelaVerify:
EquipmentType = EquipmentType.MET08DDINCAN8620;
eventName = EventName.FileRead;
FileNameWithoutExtension = "candela_iqs_01";
Header = string.Concat("LotID;OperatorID;RecipeName;CandelaRecipe;WaferID;PocketNumber;RunDate;RunID;Reactor;", "Slip Lines;Cracks;Epi Def;Haze Spot;Small LPD;Medium LPD;Large LPD;Cracks_A;Spirals;Craters;8620 Small;Pits;Tool ID;Defect Count");
QueryFilter = "Candela Cracking";
Title = "Candela";
HTML = @"GaN Epi Data\12 - candela.html";
break;
case Test.CandelaPSL:
EquipmentType = EquipmentType.MET08DDINCAN8620_Daily;
eventName = EventName.FileReadDaily;
FileNameWithoutExtension = "candela_iqs_01";
Header = string.Empty;
QueryFilter = "102-83nm";
Title = "Candela";
HTML = @"GaN Epi Data\12 - candela.html";
break;
case Test.CandelaProdU:
EquipmentType = EquipmentType.MET08DDINCAN8620_Daily;
eventName = EventName.FileReadDaily;
FileNameWithoutExtension = "candela_iqs_01";
Header = string.Empty;
QueryFilter = "SPE verification";
Title = "Candela";
HTML = @"GaN Epi Data\12 - candela.html";
break;
case Test.Denton:
EquipmentType = EquipmentType.MET08EBEAMINTEGRITY26;
eventName = EventName.FileRead;
FileNameWithoutExtension = "denton_iqs_01";
Header = "Tool;fDate;Run;Recipe;Operator;Name;Value";
QueryFilter = "Denton_Voltage_AVG";
Title = "Denton Data";
HTML = @"Support Process\03 - ebeam02_denton_v1.html";
break;
case Test.Hall:
EquipmentType = EquipmentType.MET08HALLHL5580;
eventName = EventName.FileRead;
FileNameWithoutExtension = "hall_iqs_01";
Header = "Lot;Tool;TimeDate;RunDate;RunID;Part;Reactor;Scribe;PocketNumber;Tool ID;Name;Value";
QueryFilter = "Hall Rs";
Title = "Hall Data";
HTML = @"GaN Epi Data\04 - hall.html";
break;
case Test.MonthlyHall:
EquipmentType = EquipmentType.MET08HALLHL5580_Monthly;
eventName = EventName.FileReadMonthly;
FileNameWithoutExtension = "hall_iqs_01";
Header = "Lot;Tool;TimeDate;RunDate;RunID;Part;Reactor;Scribe;PocketNumber;Tool ID;Name;Value";
QueryFilter = "Hall Rs";
Title = "Hall Monthly Verification";
HTML = @"Metrology\06 - hall_verif_monthly.html";
break;
case Test.WeeklyHall:
EquipmentType = EquipmentType.MET08HALLHL5580_Weekly;
eventName = EventName.FileReadWeekly;
FileNameWithoutExtension = "hall_iqs_01";
Header = "Lot;Tool;TimeDate;RunDate;RunID;Part;Reactor;Scribe;PocketNumber;Tool ID;Name;Value";
QueryFilter = "Hall Rs";
Title = "Hall Weekly Verification";
HTML = @"Metrology\15 - hall_verif_weekly.html";
break;
case Test.Lehighton:
EquipmentType = EquipmentType.MET08NDFRESIMAP151C;
eventName = EventName.FileRead;
FileNameWithoutExtension = "lei_iqs_01";
Header = "Reactor;Date;Recipe;Lot;Pocket;Scribe;Tool;Name;Value";
QueryFilter = "LEI RS Average value";
Title = "Lehighton";
HTML = @"GaN Epi Data\13 - lehighton.html";
break;
case Test.VerificationLehighton:
EquipmentType = EquipmentType.MET08NDFRESIMAP151C_Verification;
eventName = EventName.FileRead;
FileNameWithoutExtension = "___";
Header = "Reactor;Date;Recipe;Lot;Pocket;Scribe;Tool;Name;Value";
QueryFilter = "___";
Title = "LEI Weekly Verification 2 Ohm cm";
HTML = @"Metrology\14 - lei_verif_weekly.html.html";
break;
case Test.Microscope:
EquipmentType = EquipmentType.MET08MESMICROSCOPE;
eventName = EventName.FileRead;
FileNameWithoutExtension = string.Empty;
Header = string.Empty;
QueryFilter = "Microscope Center 5x";
Title = "Total Microscope Defects";
HTML = string.Empty;
break;
case Test.RPMXY:
EquipmentType = EquipmentType.MET08PLMAPRPM;
eventName = EventName.FileRead;
FileNameWithoutExtension = "RPM_Data";
Header = "Lot;Date;Recipe;Reactor;Scribe;Pocket;Tool;Name;Value";
QueryFilter = "Barrier_Composition_RPM_XY";
Title = "RPM XY Data ***&*** View Data";
HTML = @"GaN Epi Data\09 - rpm --- 08 - photoluminescence.html";
break;
case Test.RPMAverage:
EquipmentType = EquipmentType.MET08PLMAPRPM;
eventName = EventName.FileRead;
FileNameWithoutExtension = "RPMdata-short";
Header = "fProductId;fDate;average;stdDev;fRecipeName;Reactor;g4Scribe;Pocket Number;Tool ID;Recipe From Rpm File";
QueryFilter = "Epi Thickness Mean";
Title = "RPM Average Data";
HTML = @"GaN Epi Data\09 - rpm.html";
break;
case Test.RPMPLRatio:
EquipmentType = EquipmentType.MET08PLMAPRPM;
eventName = EventName.FileRead;
FileNameWithoutExtension = "PHOTOLUMINESCENCE_data-short";
Header = "fProductId;fDate;g4Scribe;fRecipeName;bandEdge_nm;bandEdge_V;yellowBand_Pmw;yellowBand_nm;yellowBand_V;Reactor;Pocket Number;Tool ID";
QueryFilter = "PL Ratio";
Title = "Photoluminescence: PL Ratio";
HTML = @"GaN Epi Data\08 - photoluminescence.html";
break;
case Test.DailyRPMXY:
EquipmentType = EquipmentType.MET08PLMAPRPM_Daily;
eventName = EventName.FileReadDaily;
FileNameWithoutExtension = "RPM_Data";
Header = "Lot;Date;Recipe;Reactor;Scribe;Pocket;Tool;Name;Value";
QueryFilter = "Barrier_Composition_RPM_XY";
Title = "";
HTML = @"Metrology\?";
break;
case Test.DailyRPMAverage:
EquipmentType = EquipmentType.MET08PLMAPRPM_Daily;
eventName = EventName.FileReadDaily;
FileNameWithoutExtension = "RPMdata-short";
Header = "fProductId;fDate;average;stdDev;fRecipeName;Reactor;g4Scribe;Pocket Number;Tool ID;Recipe From Rpm File";
QueryFilter = "Epi Thickness Mean";
Title = "";
HTML = @"Metrology\?";
break;
case Test.DailyRPMPLRatio:
EquipmentType = EquipmentType.MET08PLMAPRPM_Daily;
eventName = EventName.FileReadDaily;
FileNameWithoutExtension = "PHOTOLUMINESCENCE_data-short";
Header = "fProductId;fDate;g4Scribe;fRecipeName;bandEdge_nm;bandEdge_V;yellowBand_Pmw;yellowBand_nm;yellowBand_V;Reactor;Pocket Number;Tool ID";
QueryFilter = "PL Ratio";
Title = "RPM Daily Verification";
HTML = @"Metrology\17 - rpm_verif_daily.html";
break;
case Test.VerificationRPM:
EquipmentType = EquipmentType.MET08PLMAPRPM_Verification;
eventName = EventName.FileReadVerification;
FileNameWithoutExtension = "PhotoLuminescence_Ver";
Header = "Part;Process;Date;Test;Value";
QueryFilter = "PL Edge Wavelength";
Title = "PL Daily Verification - [PL Edge Wavelength]";
HTML = @"Metrology\18 - photoluminescence_verif_daily.html";
break;
case Test.Photoreflectance:
EquipmentType = EquipmentType.MET08PRFUSB4000;
eventName = EventName.FileRead;
FileNameWithoutExtension = "photoreflect_iqs_01";
Header = "Lot;Date;Part;Reactor;Scribe;Pocket;Tool;Point;WaferPosition_PR;PR_Peak";
QueryFilter = "PR Barrier Composition";
Title = "Photoreflectance 6 in, Photoreflectance 8 in";
HTML = @"GaN Epi Data\07 - photoreflectance.html";
break;
case Test.UV:
EquipmentType = EquipmentType.MET08UVH44GS100M;
eventName = EventName.FileRead;
FileNameWithoutExtension = "uv_iqs_01";
Header = string.Empty;
QueryFilter = "UV Broken";
Title = "UV";
HTML = @"GaN Epi Data\15 - uv 2.1.html";
break;
case Test.VpdIcpmsAnalyte:
EquipmentType = EquipmentType.MET08VPDSUBCON;
eventName = EventName.FileRead;
FileNameWithoutExtension = "VPD_iqs_01";
Header = "Reactor;RunID;RunDate;PartNumber;PocketNumber;WaferScribe;Analyte;Value";
QueryFilter = "Mg";
Title = "VpdIcpmsAnalyteData";
HTML = @"";
break;
case Test.WarpAndBow:
EquipmentType = EquipmentType.MET08WGEOMX203641Q;
eventName = EventName.FileRead;
FileNameWithoutExtension = "warp_iqs_01";
Header = "fDate;fRecipeName;fProductId;g4Scribe;warp;bow;tool;Reactor;Pocket ID;bow_range;BowX;BowY;CenterBow";
QueryFilter = "BowCenter";
Title = "Warp and Bow";
HTML = @"GaN Epi Data\14 - warp.html";
break;
case Test.VerificationWarpAndBow:
EquipmentType = EquipmentType.MET08WGEOMX203641Q_Verification;
eventName = EventName.FileReadVerification;
FileNameWithoutExtension = "warp_ver_iqs_01";
Header = "Part;Process;Date;WaferScribe;totWarp;bow";
QueryFilter = "Bow Calibration";
Title = "6 Inch Warp/Bow Daily Verification, 8 Inch Warp/Bow Daily Verification";
HTML = @"Metrology\19 - warp_cal_daily.html";
break;
case Test.XRDXY:
EquipmentType = EquipmentType.MET08XRDXPERTPROMRDXL;
eventName = EventName.FileRead;
FileNameWithoutExtension = "xrd_iqs_NEW_01";
Header = "Reactor;fDate;fRecipeName;Lot;pocketNumber;g4Scribe;ToolID;Name;Value;Group";
QueryFilter = "SL Period";
Title = "XRD XY Raw Data Viewer";
HTML = @"GaN Epi Data\11 - xrd.html";
break;
case Test.XRDWeightedAverage:
EquipmentType = EquipmentType.MET08XRDXPERTPROMRDXL;
eventName = EventName.FileRead;
FileNameWithoutExtension = "xrd_iqs_NEW_01_WtAVG";
Header = "Reactor;fDate;fRecipeName;Lot;pocketNumber;g4Scribe;Name;Value;Group";
//QueryFilter = "Al% Barrier WTAVG";
QueryFilter = "SL Period WTAVG";
Title = "XRD Weighted Average Data";
HTML = @"GaN Epi Data\11 - xrd.html";
break;
case Test.MonthlyXRD:
EquipmentType = EquipmentType.MET08XRDXPERTPROMRDXL_Monthly;
eventName = EventName.FileReadMonthly;
FileNameWithoutExtension = "xrd_monthly_ver_iqs_01";
Header = "Part;Process;Date;TestName;Value";
QueryFilter = "XRD 2-Theta Position";
Title = "XRD Monthly Verification";
HTML = @"Metrology\03 - xrd_verif_monthly.html";
break;
case Test.WeeklyXRD:
EquipmentType = EquipmentType.MET08XRDXPERTPROMRDXL_Weekly;
eventName = EventName.FileReadWeekly;
FileNameWithoutExtension = "xrd_weekly_ver_iqs_01";
Header = "Part;Process;Lot;Date;TestName;Value";
QueryFilter = "XRD Weekly AL% Center";
Title = "XRD Weekly Verification";
HTML = @"Metrology\12 - xrd_verif_weekly.html";
break;
case Test.JVXRD:
EquipmentType = EquipmentType.METBRXRAYJV7300L;
eventName = EventName.FileRead;
FileNameWithoutExtension = "xrd_iqs_NEW_01";
Header = "Reactor;fDate;fRecipeName;Lot;pocketNumber;g4Scribe;ToolID;Name;Value;Group";
QueryFilter = "SL Period";
Title = "XRD XY Raw Data Viewer";
HTML = @"GaN Epi Data\11 - xrd.html";
break;
default:
throw new Exception();
}
FileName = string.Concat(FileNameWithoutExtension, ".txt");
return eventName.ToString();
}
public override string ToString()
{
return string.Concat(EquipmentType, " - (", Enum, "");
}
}
}
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