{ "prodSpec": { "keyId": 5227, "specType": "Production", "status": "Active", "minutesPerWafer": 15.99, "proveInTime": 339.8, "layerType": "Standard 1 Layer", "reactorType": "ASM", "susceptorType": "GMSI", "tubePressureType": "AP", "recipeLayers": [ { "layerNo": 1, "layerId": "L1", "layerType": "DEP", "layerRecipe": 946, "layerDopant": "Phosphorus", "layerThickMin": 21.15, "layerThickTarget": 21.8, "layerThickMax": 22.45, "layerThickUnits": "�m", "layerThickAMin": null, "layerThickATarget": null, "layerThickAMaxes": null, "layerThickAUnits": null, "layerResMin": 5.102, "layerResTarget": 5.26, "layerResMax": 5.418, "layerResUnits": "�-cm", "layerSResMin": null, "layerSResTarget": null, "layerSResMax": null, "layerSResUnits": null } ], "prodVers": [ { "keyId": 15185 }, { "keyId": 15186 }, { "keyId": 15187 }, { "keyId": 15526 } ], "epiPart": { "keyID": "U108", "waferSize": "200 mm 8 in" }, "custEpiParts": [ { "keyId": "7127*U108" } ], "prsStages": [ { "keyId": "5227*UNLOAD", "psn": 5227, "stage": "UNLOAD", "cleans": { "cleanRecipe": null, "cleanSigReq": false, "cleanTools": [] }, "inspection": { "microscope": false, "brightlight": false, "inspSigReq": false, "inspInterval": null, "frontSide": { "lpd": null, "scratches": null, "scratchLen": null, "pits": null, "mounds": null, "stackFaults": null, "spikes": null, "spots": null, "blDefects": null }, "backSide": { "scratches": null, "scratchLen": null, "nodules": null, "spikes": null } }, "surfscan": { "surfscanSigReq": false, "surfscanRecipes": [] }, "qaMetTests": [ { "test": "THICK_ONLY", "property": "THICK", "propertyDesc": "Thickness", "toolClass": "FTIR", "recipe": "PROD_8inch", "recipePattern": "14PT_3mm", "min": 21.05, "max": 22.45, "phaseMin": null, "slots": "L", "wfrQty": 1, "reactSched": false, "interval": 2, "start": 1, "sequence": "1, 3, 5..." }, { "test": "CRES", "property": "CRES", "propertyDesc": "HgCv Res", "toolClass": "HGCV", "recipe": "8IN4_10.SET", "recipePattern": "8IN4_10.SET", "min": 4.74, "max": 5.47, "phaseMin": 88.5, "slots": 1, "wfrQty": 1, "reactSched": true, "interval": 8, "start": 1, "sequence": "1, 9, 17..." } ] }, { "keyId": "5227*LWI", "psn": 5227, "stage": "LWI", "cleans": { "cleanRecipe": null, "cleanSigReq": false, "cleanTools": [] }, "inspection": { "microscope": true, "brightlight": true, "inspSigReq": true, "inspInterval": 2, "frontSide": { "lpd": 20, "scratches": 1, "scratchLen": 1, "pits": 1, "mounds": 1, "stackFaults": 10, "spikes": 5, "spots": 4, "blDefects": 1 }, "backSide": { "scratches": 1, "scratchLen": 1, "nodules": 10, "spikes": null } }, "surfscan": { "surfscanSigReq": true, "surfscanRecipes": [ { "recipe": "8IN_IFX_ROTR", "defects": 40, "haze": 2, "sampleSize": 3 }, { "recipe": "IFX100_ROTR", "defects": 40, "haze": 2, "sampleSize": 6 }, { "recipe": "IFX25_ROTR", "defects": 40, "haze": 2, "sampleSize": 25 } ] } }, { "keyId": "5227*POST", "psn": 5227, "stage": "POST", "cleans": { "cleanRecipe": "8INCLEAN", "cleanSigReq": false, "cleanTools": [] }, "inspection": { "microscope": false, "brightlight": false, "inspSigReq": false, "inspInterval": null, "frontSide": { "lpd": null, "scratches": null, "scratchLen": null, "pits": null, "mounds": null, "stackFaults": null, "spikes": null, "spots": null, "blDefects": null }, "backSide": { "scratches": null, "scratchLen": null, "nodules": null, "spikes": null } }, "surfscan": { "surfscanSigReq": false, "surfscanRecipes": [ { "recipe": "IFXPOSTCLEAN", "defects": 40, "haze": 2, "sampleSize": null } ] } }, { "keyId": "5227*QA", "psn": 5227, "stage": "QA", "cleans": { "cleanRecipe": null, "cleanSigReq": false, "cleanTools": [] }, "inspection": { "microscope": false, "brightlight": false, "inspSigReq": false, "inspInterval": null, "frontSide": { "lpd": null, "scratches": null, "scratchLen": null, "pits": null, "mounds": null, "stackFaults": null, "spikes": null, "spots": null, "blDefects": null }, "backSide": { "scratches": null, "scratchLen": null, "nodules": null, "spikes": null } }, "surfscan": { "surfscanSigReq": false, "surfscanRecipes": [] }, "qaMetTests": [ { "test": "ADE", "property": "THICK", "propertyDesc": "Thickness", "toolClass": "FTIR", "recipe": "8inch Centerpoint", "recipePattern": "Centerpoint", "min": 21.05, "max": 22.45, "phaseMin": null, "slots": 1, "wfrQty": 1, "reactSched": false, "interval": 1, "start": 1, "sequence": "1, 2, 3..." }, { "test": "ADE", "property": "THICK", "propertyDesc": "Thickness", "toolClass": "FTIR", "recipe": "8inch Centerpoint", "recipePattern": "Centerpoint", "min": 21.05, "max": 22.45, "phaseMin": null, "slots": "L", "wfrQty": 1, "reactSched": false, "interval": 1, "start": 1, "sequence": "1, 2, 3..." } ] } ] }, "_links": { "self": { "href": "http://messa014.infineon.com/api/oiWizard/materials/PROD_SPEC/5227", "title": "Self" } }, "_class": "resource" }