1605 lines
64 KiB
C#
1605 lines
64 KiB
C#
using System;
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namespace Shared.Metrology
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{
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public static class ColumnGet
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{
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public static string GetDiplayName(this Column column)
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{
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string results;
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switch (column)
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{
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//case Column._8in_Total_Warp_Verification: results = "8in Total Warp Verification"; break;
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//case Column.AFM_Monthly_Y: results = "AFM-Monthly Y"; break;
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//case Column.AFM_Monthly: results = "AFM_Monthly"; break;
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case Column.AFM_Pit_Count:
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results = "AFM Pit Count";
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break;
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case Column.AFM_Roughness:
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results = "AFM Roughness";
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break;
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//case Column.Adder_Bin_1: results = "Adder Bin 1"; break;
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//case Column.Adder_Bin_2: results = "Adder Bin 2"; break;
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//case Column.Adder_Bin_3: results = "Adder Bin 3"; break;
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//case Column.Adder_Bin_4: results = "Adder Bin 4"; break;
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//case Column.Adder_Bin_5: results = "Adder Bin 5"; break;
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//case Column.Adder_Bin_6: results = "Adder Bin 6"; break;
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//case Column.Adder_Bin_9: results = "Adder Bin 9"; break;
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case Column.Al_B_B_WTAVG:
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results = "Al% B.B. WTAVG";
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break;
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case Column.Al_B_B_:
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results = "Al% B.B.";
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break;
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case Column.Al_Barrier_WTAVG:
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results = "Al% Barrier WTAVG";
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break;
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case Column.Al_Barrier:
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results = "Al% Barrier";
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break;
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case Column.Al_SLS_WTAVG:
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results = "Al% SLS WTAVG";
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break;
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case Column.Al_SLS:
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results = "Al% SLS";
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break;
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case Column.Al_TL1_WTAVG:
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results = "Al% TL1 WTAVG";
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break;
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case Column.Al_TL1:
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results = "Al% TL1";
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break;
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case Column.Al_TL2_WTAVG:
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results = "Al% TL2 WTAVG";
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break;
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//case Column.BV_Resistance: results = "BV Resistance"; break; //BV Monthly Verification
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case Column.BandEdge_V:
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results = "BandEdge_V";
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break;
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case Column.BandEdge_V_XY:
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results = "BandEdge_V_XY";
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break;
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case Column.BandEdge_nm:
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results = "BandEdge_nm";
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break;
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case Column.Barrier_Composition_RPM_XY:
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results = "Barrier_Composition_RPM_XY";
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break;
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case Column.Bow_Calibration:
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results = "Bow Calibration";
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break;
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case Column.Bow_Range:
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results = "Bow Range";
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break;
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case Column.Bow:
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results = "Bow";
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break;
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case Column.BowCenter:
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results = "BowCenter";
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break;
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case Column.BowX:
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results = "BowX";
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break;
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case Column.BowY:
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results = "BowY";
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break;
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case Column.Breakdown_Voltage_Edge:
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results = "Breakdown Voltage - Edge";
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break;
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case Column.Breakdown_VoltageMiddle:
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results = "Breakdown Voltage - Middle";
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break;
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case Column.Breakdown_Voltage:
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results = "Breakdown Voltage";
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break;
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case Column.CV_C_at_10V:
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results = "CV C at -10V";
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break;
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case Column.CV_Nd_Min:
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results = "CV Nd Min";
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break;
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//case Column.Candela_Large_LPD_Quarterly: results = "Candela Large LPD Quarterly"; break;
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//case Column.Candela_Medium_LPD_Quarterly: results = "Candela Medium LPD Quarterly"; break;
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//case Column.Candela_Small_LPD_Quarterly: results = "Candela Small LPD Quarterly"; break;
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//case Column.Candela_Total_Quarterly: results = "Candela Total Quarterly"; break;
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case Column.Candela_102_83nm:
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results = "102-83nm";
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break;
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case Column.Candela_1_1um:
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results = "1.1um";
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break;
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case Column.Candela_496nm:
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results = "496nm";
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break;
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case Column.Candela_600nm:
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results = "600nm";
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break;
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case Column.Candela_8620_Small:
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results = "Candela 8620 Small";
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break;
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case Column.Candela_Crack_Verification:
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results = "Crack Verification";
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break;
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case Column.Candela_Cracking:
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results = "Candela Cracking";
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break;
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case Column.Candela_Cracking_Acceptable:
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results = "Candela Cracking Acceptable";
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break;
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case Column.Candela_Crater:
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results = "Candela Crater";
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break;
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case Column.Candela_Crater_Verification:
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results = "Crater verification";
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break;
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case Column.Candela_Haze:
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results = "Candela Haze";
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break;
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case Column.Candela_LPD_Large:
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results = "Candela LPD Large";
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break;
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case Column.Candela_LPD_Medium:
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results = "Candela LPD Medium";
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break;
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case Column.Candela_LPD_Small:
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results = "Candela LPD Small";
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break;
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case Column.Candela_Large_Verification:
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results = "Large Verification";
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break;
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case Column.Candela_Medium_Verification:
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results = "Medium Verification";
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break;
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case Column.Candela_Pits:
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results = "Candela Pits";
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break;
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case Column.Candela_Pits_Verification:
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results = "Pits verification";
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break;
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case Column.Candela_SPE:
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results = "Candela SPE";
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break;
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case Column.Candela_SPE_Verification:
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results = "SPE verification";
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break;
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case Column.Candela_Slip:
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results = "Candela Slip";
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break;
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case Column.Candela_Small_Verification:
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results = "Small Verification";
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break;
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case Column.Candela_Spirals:
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results = "Candela Spirals";
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break;
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case Column.Candela_Spirals_Verification:
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results = "Candela Spirals Verification";
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break;
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case Column.Candela_Total_Defects:
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results = "Candela Total Defects";
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break;
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case Column.Candela_Total_PSL:
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results = "Candela Total PSL";
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break;
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case Column.Candela__1_1um:
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results = ">1.1um";
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break;
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//case Column.Comment: results = "Comment"; break;
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//case Column.Conductivity: results = "Conductivity"; break;
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case Column.Contact_Symmetry:
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results = "Contact Symmetry";
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break;
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//case Column.Cracking_verification: results = "Cracking verification"; break;
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//case Column.Crater_verification: results = "Crater verification"; break;
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case Column.Date:
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results = "Date";
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break;
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case Column.Denton_Crystal_Life:
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results = "Denton_Crystal_Life";
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break;
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case Column.Denton_Current_AVG:
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results = "Denton_Current_AVG";
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break;
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case Column.Denton_Current_STDEV:
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results = "Denton_Current_STDEV";
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break;
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case Column.Denton_Deposition_Power_AVG:
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results = "Denton_Deposition_Power_AVG";
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break;
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case Column.Denton_Deposition_Power_STDEV:
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results = "Denton_Deposition_Power_STDEV";
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break;
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case Column.Denton_Deposition_Rate_AVG:
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results = "Denton_Deposition_Rate_AVG";
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break;
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case Column.Denton_Deposition_Rate_STDEV:
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results = "Denton_Deposition_Rate_STDEV";
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break;
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case Column.Denton_Gun_Pocket:
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results = "Denton_Gun_Pocket";
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break;
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case Column.Denton_Pumpdown_Time:
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results = "Denton_Pumpdown_Time";
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break;
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case Column.Denton_Voltage_AVG:
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results = "Denton_Voltage_AVG";
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break;
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case Column.Denton_Voltage_STDEV:
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results = "Denton_Voltage_STDEV";
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break;
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case Column.Employee:
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results = "Employee";
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break;
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case Column.Epi_Thickness_Mean:
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results = "Epi Thickness Mean";
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break;
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case Column.Epi_Thickness_Mean_XY:
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results = "Epi Thickness Mean_XY";
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break;
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case Column.Epi_Thickness_Std_Dev_:
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results = "Epi Thickness Std Dev %";
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break;
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case Column.FWHM_006_WTAVG:
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results = "FWHM 006 WTAVG";
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break;
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case Column.FWHM_006:
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results = "FWHM 006";
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break;
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case Column.FWHM_105_WTAVG:
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results = "FWHM 105 WTAVG";
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break;
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case Column.FWHM_105:
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results = "FWHM 105";
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break;
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case Column.Hall_Rs:
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results = "Hall Rs";
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break;
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case Column.Hall_Mobility_verif_sample:
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results = "Hall_Mobility_verif_sample";
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break;
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case Column.Hall_Ns_verif_sample:
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results = "Hall_Ns_verif_sample";
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break;
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case Column.Hall_Rs_verif_sample:
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results = "Hall_Rs_verif_sample";
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break;
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case Column.Job:
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results = "Job";
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break;
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case Column.LEI_RS_Average_value:
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results = "LEI RS Average value";
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break;
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case Column.LEI_RS_Maximum_value:
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results = "LEI RS Maximum value";
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break;
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case Column.LEI_RS_Minimum_value:
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results = "LEI RS Minimum value";
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break;
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case Column.LEI_RS_STDEV:
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results = "LEI RS STDEV";
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break;
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case Column.LEI_RS_STDEV_:
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results = "LEI RS STDEV%";
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break;
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//case Column.Large_Adder_Sum: results = "Large Adder Sum"; break;
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case Column.Lot:
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results = "Lot";
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break;
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//case Column.Medium_Adder_Sum: results = "Medium Adder Sum"; break;
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case Column.Microscope_Center_5x:
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results = "Microscope Center 5x";
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break;
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case Column.Microscope_Center_50x:
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results = "Microscope Center 50x";
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break;
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case Column.Microscope_Middle_5x:
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results = "Microscope Middle 5x";
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break;
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case Column.Microscope_Middle_50x:
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results = "Microscope Middle 50x";
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break;
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case Column.Microscope_Edge_5x:
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results = "Microscope Edge 5x";
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break;
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case Column.Microscope_Edge_50x:
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results = "Microscope Edge 50x";
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break;
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case Column.Mobility_Verification:
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results = "Mobility Verification";
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break;
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case Column.Mobility:
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results = "Mobility";
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break;
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case Column.Ns_Verification:
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results = "Ns Verification";
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break;
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case Column.PL_Edge_Wavelength:
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results = "PL Edge Wavelength";
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break;
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case Column.PL_Ratio:
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results = "PL Ratio";
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break;
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case Column.PR_Barrier_Composition:
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results = "PR Barrier Composition";
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break;
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case Column.PR_Peak:
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results = "PR Peak";
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break;
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case Column.Part:
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results = "Part";
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break;
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//case Column.Particles_verification: results = "Particles verification"; break;
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//case Column.Pits_verification: results = "Pits verification"; break;
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//case Column.Pocket: results = "Pocket"; break;
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//case Column.Post_Bin_1: results = "Post Bin 1"; break;
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//case Column.Post_Bin_2: results = "Post Bin 2"; break;
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//case Column.Post_Bin_3: results = "Post Bin 3"; break;
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//case Column.Post_Bin_4: results = "Post Bin 4"; break;
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//case Column.Post_Bin_5: results = "Post Bin 5"; break;
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//case Column.Post_Bin_6: results = "Post Bin 6"; break;
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//case Column.Post_Bin_9: results = "Post Bin 9"; break;
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//case Column.Pre_Bin_1: results = "Pre Bin 1"; break;
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//case Column.Pre_Bin_2: results = "Pre Bin 2"; break;
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//case Column.Pre_Bin_3: results = "Pre Bin 3"; break;
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//case Column.Pre_Bin_4: results = "Pre Bin 4"; break;
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//case Column.Pre_Bin_5: results = "Pre Bin 5"; break;
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//case Column.Pre_Bin_6: results = "Pre Bin 6"; break;
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//case Column.Pre_Bin_9: results = "Pre Bin 9"; break;
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case Column.Process:
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results = "Process";
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break;
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//case Column.RPM_verif_Thickness_1: results = "RPM_verif_Thickness_1"; break;
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//case Column.RPM_verif_Thickness_2: results = "RPM_verif_Thickness_2"; break;
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//case Column.RPM_verif_Thickness_3: results = "RPM_verif_Thickness_3"; break;
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//case Column.RPM_verif_Thickness_Average: results = "RPM_verif_Thickness_Average"; break;
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//case Column.RTA_oxide_Thk_Change: results = "RTA oxide Thk Change"; break;
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//case Column.RTA_oxide_post_anneal_Thk: results = "RTA oxide post-anneal Thk"; break;
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//case Column.RTA_oxide_pre_anneal_Thk: results = "RTA oxide pre-anneal Thk"; break;
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case Column.Recipe:
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results = "Recipe";
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break;
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//case Column.Resistivity_2_ohm_cm: results = "Resistivity 2 ohm cm"; break; //LEI Weekly Verification
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//case Column.Resistivity_600_ohm_cm: results = "Resistivity 600 ohm cm"; break; //LEI Weekly Verification
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case Column.Rs_verification:
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results = "Rs verification";
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break;
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case Column.Rs_verif_100kohm:
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results = "Rs_verif_100kohm";
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break;
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case Column.Rs_verif_10ohm:
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results = "Rs_verif_10ohm";
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break;
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case Column.Rs_verif_1kohm:
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results = "Rs_verif_1kohm";
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break;
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case Column.SID:
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results = "SID";
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break;
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case Column.SL_Period_WTAVG:
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results = "SL Period WTAVG";
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break;
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case Column.SL_Period:
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results = "SL Period";
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break;
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//case Column.SPE_verification: results = "SPE verification"; break;
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//case Column.Sample_ID: results = "Sample ID"; break;
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case Column.Sheet_Concentration:
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results = "Sheet Concentration";
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break;
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//case Column.Size: results = "Size"; break;
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//case Column.Small_Adder_Sum: results = "Small Adder Sum"; break;
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//case Column.Spirals_verification: results = "Spirals verification"; break;
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case Column.Time:
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results = "Time";
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break;
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case Column.Tool_ID:
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results = "Tool ID";
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break;
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//case Column.Total_LPD_Adder: results = "Total LPD Adder"; break;
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//case Column.Total_Verification: results = "Total Verification"; break;
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case Column.Total_Warp_Calibration:
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results = "Total Warp Calibration";
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break;
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case Column.UV_Broken:
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results = "UV Broken";
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break;
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case Column.UV_Chipping:
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results = "UV Chipping";
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break;
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case Column.UV_Cracking_0_3mm_:
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results = "UV Cracking (0-3mm)";
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break;
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case Column.UV_Cracking_3_7mm_:
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results = "UV Cracking (3-7mm)";
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break;
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case Column.UV_Cracking_7mm_:
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results = "UV Cracking (>7mm)";
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break;
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case Column.UV_Crazing:
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results = "UV Crazing";
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break;
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case Column.UV_Crazing_Acceptable:
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results = "UV Crazing Acceptable";
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break;
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case Column.UV_FULL_Characterization_Wafer:
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results = "UV FULL Characterization Wafer";
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break;
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case Column.UV_Haze_count_:
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results = "UV Haze (count)";
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break;
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case Column.UV_LIGHT_Characterization_Wafer:
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results = "UV LIGHT Characterization Wafer";
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break;
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case Column.UV_Non_rotation:
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results = "UV Non-rotation";
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break;
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case Column.UV_Other:
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results = "UV Other";
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break;
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case Column.UV_Scratch_count_:
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results = "UV Scratch (count)";
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break;
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case Column.UV_Slip_count_:
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results = "UV Slip (count)";
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break;
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case Column.UV_True_Haze:
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results = "UV True Haze";
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break;
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case Column.UV_True_Haze_Acceptable:
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results = "UV True Haze Acceptable";
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break;
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case Column.UV_SPE_1mm_count:
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results = "UV-SPE (>1mm) count";
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break;
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case Column.UV_SPE_count_:
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results = "UV-SPE (count)";
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break;
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case Column.Verification_Contact_Symmetry:
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results = "Verification Contact Symmetry";
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break;
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case Column.Vp_Pinch_Off_Voltage:
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results = "Vp Pinch Off Voltage";
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break;
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case Column.Wafer_ID:
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results = "Wafer ID";
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break;
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//case Column.Wafer_Pocket: results = "Wafer Pocket"; break;
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case Column.Wafer_Region:
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results = "Wafer Region";
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break;
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case Column.Wafer_Scribe:
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results = "Wafer Scribe";
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break;
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case Column.WaferPocket_Candela:
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results = "WaferPocket_Candela";
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break;
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case Column.WaferPocket_Warp:
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results = "WaferPocket_Warp";
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break;
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case Column.WaferPosition_CV:
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results = "WaferPosition_CV";
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break;
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case Column.WaferPosition_BV:
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results = "WaferPosition_BV";
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break;
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case Column.WaferPosition_Hall:
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results = "WaferPosition_Hall";
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break;
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case Column.WaferPosition_PR:
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results = "WaferPosition_PR";
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break;
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case Column.Warp:
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|
results = "Warp";
|
|
break;
|
|
case Column.X_Coord:
|
|
results = "X-Coord";
|
|
break;
|
|
case Column.XRD_2_Theta_Peak_002:
|
|
results = "XRD 2 Theta Peak 002";
|
|
break;
|
|
case Column.XRD_2_Theta_Peak_101:
|
|
results = "XRD 2 Theta Peak 101";
|
|
break;
|
|
case Column.XRD_2_Theta_Position:
|
|
results = "XRD 2-Theta Position";
|
|
break;
|
|
case Column.XRD_2_Theta_Position_Si_1:
|
|
results = "XRD 2-Theta Position Si 1";
|
|
break;
|
|
case Column.XRD_2_Theta_Position_Si_2:
|
|
results = "XRD 2-Theta Position Si 2";
|
|
break;
|
|
case Column.XRD_2_Theta_Position_Si_3:
|
|
results = "XRD 2-Theta Position Si 3";
|
|
break;
|
|
case Column.XRD_Peak_002_Intensity:
|
|
results = "XRD Peak 002 Intensity";
|
|
break;
|
|
case Column.XRD_Peak_101_Intensity:
|
|
results = "XRD Peak 101 Intensity";
|
|
break;
|
|
case Column.XRD_Weekly_AL_Center:
|
|
results = "XRD Weekly AL% Center";
|
|
break;
|
|
case Column.XRD_Weekly_Back_Barrier_Al_:
|
|
results = "Back Barrier Al%";
|
|
break;
|
|
case Column.XRD_Weekly_Barrier_Al_:
|
|
results = "Barrier Al%";
|
|
break;
|
|
case Column.XRD_Weekly_FWHM_002:
|
|
results = "XRD Weekly FWHM 002";
|
|
break;
|
|
case Column.XRD_Weekly_FWHM_101:
|
|
results = "XRD Weekly FWHM 101";
|
|
break;
|
|
case Column.XRD_Weekly_FWHM_105:
|
|
results = "XRD Weekly FWHM 105";
|
|
break;
|
|
case Column.XRD_Weekly_Fringe_thick_0_0_:
|
|
results = "XRD Weekly Fringe thick (0,0)";
|
|
break;
|
|
case Column.XRD_Weekly_Fringe_thick_48_48_:
|
|
results = "XRD Weekly Fringe thick (48,48)";
|
|
break;
|
|
case Column.XRD_Weekly_Intensity:
|
|
results = "XRD Weekly Intensity";
|
|
break;
|
|
case Column.XRD_Weekly_Super_Lattice_Al_:
|
|
results = "Super Lattice Al%";
|
|
break;
|
|
case Column.XRD_Weekly_Super_Lattice_period:
|
|
results = "Super Lattice period";
|
|
break;
|
|
case Column.XRD_Weekly_Super_Lattice_tks:
|
|
results = "Super Lattice tks";
|
|
break;
|
|
case Column.XRR_Thickness_nm_WTAVG:
|
|
results = "XRR Thickness (nm) WTAVG";
|
|
break;
|
|
case Column.XRR_Thickness_nm_:
|
|
results = "XRR Thickness (nm)";
|
|
break;
|
|
case Column.Y_Coord:
|
|
results = "Y-Coord";
|
|
break;
|
|
case Column.YellowBand_Power_mW_:
|
|
results = "YellowBand_Power (mW)";
|
|
break;
|
|
case Column.YellowBand_V:
|
|
results = "YellowBand_V";
|
|
break;
|
|
case Column.YellowBand_V_XY:
|
|
results = "YellowBand_V_XY";
|
|
break;
|
|
case Column.YellowBand_nm:
|
|
results = "YellowBand_nm";
|
|
break;
|
|
//case Column.pH: results = "pH"; break;
|
|
case Column.Ag:
|
|
results = "Ag";
|
|
break;
|
|
case Column.Al:
|
|
results = "Al";
|
|
break;
|
|
case Column.As:
|
|
results = "As";
|
|
break;
|
|
case Column.Au:
|
|
results = "Au";
|
|
break;
|
|
case Column.B:
|
|
results = "B";
|
|
break;
|
|
case Column.Ba:
|
|
results = "Ba";
|
|
break;
|
|
case Column.Ca:
|
|
results = "Ca";
|
|
break;
|
|
case Column.Ce:
|
|
results = "Ce";
|
|
break;
|
|
case Column.Co:
|
|
results = "Co";
|
|
break;
|
|
case Column.Cr:
|
|
results = "Cr";
|
|
break;
|
|
case Column.Cu:
|
|
results = "Cu";
|
|
break;
|
|
case Column.Fe:
|
|
results = "Fe";
|
|
break;
|
|
case Column.Ga:
|
|
results = "Ga";
|
|
break;
|
|
case Column.Ge:
|
|
results = "Ge";
|
|
break;
|
|
case Column.Hf:
|
|
results = "Hf";
|
|
break;
|
|
case Column.K:
|
|
results = "K";
|
|
break;
|
|
case Column.Li:
|
|
results = "Li";
|
|
break;
|
|
case Column.Mg:
|
|
results = "Mg";
|
|
break;
|
|
case Column.Mn:
|
|
results = "Mn";
|
|
break;
|
|
case Column.Mo:
|
|
results = "Mo";
|
|
break;
|
|
case Column.Na:
|
|
results = "Na";
|
|
break;
|
|
case Column.Ni:
|
|
results = "Ni";
|
|
break;
|
|
case Column.P:
|
|
results = "P";
|
|
break;
|
|
case Column.Pb:
|
|
results = "Pb";
|
|
break;
|
|
case Column.Sn:
|
|
results = "Sn";
|
|
break;
|
|
case Column.Ta:
|
|
results = "Ta";
|
|
break;
|
|
case Column.Ti:
|
|
results = "Ti";
|
|
break;
|
|
case Column.W:
|
|
results = "W";
|
|
break;
|
|
case Column.Y:
|
|
results = "Y";
|
|
break;
|
|
case Column.Zn:
|
|
results = "Zn";
|
|
break;
|
|
default:
|
|
throw new Exception();
|
|
}
|
|
return results;
|
|
}
|
|
|
|
public static Description.Param GetParam(this Column column)
|
|
{
|
|
Description.Param results;
|
|
switch (column)
|
|
{
|
|
//case Column._8in_Total_Warp_Verification: results = Description.Param.String; break;
|
|
//case Column.AFM_Monthly_Y: results = Description.Param.String; break;
|
|
//case Column.AFM_Monthly: results = Description.Param.String; break;
|
|
case Column.AFM_Pit_Count:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.AFM_Roughness:
|
|
results = Description.Param.String;
|
|
break;
|
|
//case Column.Adder_Bin_1: results = Description.Param.String; break;
|
|
//case Column.Adder_Bin_2: results = Description.Param.String; break;
|
|
//case Column.Adder_Bin_3: results = Description.Param.String; break;
|
|
//case Column.Adder_Bin_4: results = Description.Param.String; break;
|
|
//case Column.Adder_Bin_5: results = Description.Param.String; break;
|
|
//case Column.Adder_Bin_6: results = Description.Param.String; break;
|
|
//case Column.Adder_Bin_9: results = Description.Param.String; break;
|
|
case Column.Al_B_B_WTAVG:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Al_B_B_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Al_Barrier_WTAVG:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Al_Barrier:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Al_SLS_WTAVG:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Al_SLS:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Al_TL1_WTAVG:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Al_TL1:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Al_TL2_WTAVG:
|
|
results = Description.Param.String;
|
|
break;
|
|
//case Column.BV_Resistance: results = Description.Param.String; break;
|
|
case Column.BandEdge_V:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.BandEdge_V_XY:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.BandEdge_nm:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Barrier_Composition_RPM_XY:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Bow_Calibration:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Bow_Range:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Bow:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.BowCenter:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.BowX:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.BowY:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Breakdown_Voltage_Edge:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Breakdown_VoltageMiddle:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Breakdown_Voltage:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.CV_C_at_10V:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.CV_Nd_Min:
|
|
results = Description.Param.String;
|
|
break;
|
|
//case Column.Candela_Large_LPD_Quarterly: results = Description.Param.String; break;
|
|
//case Column.Candela_Medium_LPD_Quarterly: results = Description.Param.String; break;
|
|
//case Column.Candela_Small_LPD_Quarterly: results = Description.Param.String; break;
|
|
//case Column.Candela_Total_Quarterly: results = Description.Param.String; break;
|
|
case Column.Candela_102_83nm:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_1_1um:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_496nm:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_600nm:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_8620_Small:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Crack_Verification:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Cracking:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Cracking_Acceptable:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Crater:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Crater_Verification:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Haze:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_LPD_Large:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_LPD_Medium:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_LPD_Small:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Large_Verification:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Medium_Verification:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Pits:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Pits_Verification:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_SPE:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_SPE_Verification:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Slip:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Small_Verification:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Spirals:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Spirals_Verification:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Total_Defects:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela_Total_PSL:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Candela__1_1um:
|
|
results = Description.Param.String;
|
|
break;
|
|
//case Column.Comment: results = Description.Param.String; break;
|
|
//case Column.Conductivity: results = Description.Param.String; break;
|
|
case Column.Contact_Symmetry:
|
|
results = Description.Param.String;
|
|
break;
|
|
//case Column.Cracking_verification: results = Description.Param.String; break;
|
|
//case Column.Crater_verification: results = Description.Param.String; break;
|
|
case Column.Date:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Denton_Crystal_Life:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Denton_Current_AVG:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Denton_Current_STDEV:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Denton_Deposition_Power_AVG:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Denton_Deposition_Power_STDEV:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Denton_Deposition_Rate_AVG:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Denton_Deposition_Rate_STDEV:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Denton_Gun_Pocket:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Denton_Pumpdown_Time:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Denton_Voltage_AVG:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Denton_Voltage_STDEV:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Employee:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Epi_Thickness_Mean:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Epi_Thickness_Mean_XY:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Epi_Thickness_Std_Dev_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.FWHM_006_WTAVG:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.FWHM_006:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.FWHM_105_WTAVG:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.FWHM_105:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Hall_Rs:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Hall_Mobility_verif_sample:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Hall_Ns_verif_sample:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Hall_Rs_verif_sample:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Job:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.LEI_RS_Average_value:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.LEI_RS_Maximum_value:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.LEI_RS_Minimum_value:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.LEI_RS_STDEV:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.LEI_RS_STDEV_:
|
|
results = Description.Param.String;
|
|
break;
|
|
//case Column.Large_Adder_Sum: results = Description.Param.String; break;
|
|
case Column.Lot:
|
|
results = Description.Param.String;
|
|
break;
|
|
//case Column.Medium_Adder_Sum: results = Description.Param.String; break;
|
|
case Column.Microscope_Center_5x:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Microscope_Center_50x:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Microscope_Middle_5x:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Microscope_Middle_50x:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Microscope_Edge_5x:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Microscope_Edge_50x:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Mobility_Verification:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Mobility:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Ns_Verification:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.PL_Edge_Wavelength:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.PL_Ratio:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.PR_Barrier_Composition:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.PR_Peak:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Part:
|
|
results = Description.Param.String;
|
|
break;
|
|
//case Column.Particles_verification: results = Description.Param.String; break;
|
|
//case Column.Pits_verification: results = Description.Param.String; break;
|
|
//case Column.Pocket: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_1: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_2: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_3: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_4: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_5: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_6: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_9: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_1: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_2: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_3: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_4: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_5: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_6: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_9: results = Description.Param.String; break;
|
|
case Column.Process:
|
|
results = Description.Param.String;
|
|
break;
|
|
//case Column.RPM_verif_Thickness_1: results = Description.Param.String; break;
|
|
//case Column.RPM_verif_Thickness_2: results = Description.Param.String; break;
|
|
//case Column.RPM_verif_Thickness_3: results = Description.Param.String; break;
|
|
//case Column.RPM_verif_Thickness_Average: results = Description.Param.String; break;
|
|
//case Column.RTA_oxide_Thk_Change: results = Description.Param.String; break;
|
|
//case Column.RTA_oxide_post_anneal_Thk: results = Description.Param.String; break;
|
|
//case Column.RTA_oxide_pre_anneal_Thk: results = Description.Param.String; break;
|
|
case Column.Recipe:
|
|
results = Description.Param.String;
|
|
break;
|
|
//case Column.Resistivity_2_ohm_cm: results = Description.Param.String; break;
|
|
//case Column.Resistivity_600_ohm_cm: results = Description.Param.String; break;
|
|
case Column.Rs_verification:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Rs_verif_100kohm:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Rs_verif_10ohm:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Rs_verif_1kohm:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.SID:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.SL_Period_WTAVG:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.SL_Period:
|
|
results = Description.Param.String;
|
|
break;
|
|
//case Column.SPE_verification: results = Description.Param.String; break;
|
|
//case Column.Sample_ID: results = Description.Param.String; break;
|
|
case Column.Sheet_Concentration:
|
|
results = Description.Param.String;
|
|
break;
|
|
//case Column.Size: results = Description.Param.String; break;
|
|
//case Column.Small_Adder_Sum: results = Description.Param.String; break;
|
|
//case Column.Spirals_verification: results = Description.Param.String; break;
|
|
case Column.Time:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Tool_ID:
|
|
results = Description.Param.String;
|
|
break;
|
|
//case Column.Total_LPD_Adder: results = Description.Param.String; break;
|
|
//case Column.Total_Verification: results = Description.Param.String; break;
|
|
case Column.Total_Warp_Calibration:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_Broken:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_Chipping:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_Cracking_0_3mm_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_Cracking_3_7mm_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_Cracking_7mm_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_Crazing:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_Crazing_Acceptable:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_FULL_Characterization_Wafer:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_Haze_count_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_LIGHT_Characterization_Wafer:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_Non_rotation:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_Other:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_Scratch_count_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_Slip_count_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_True_Haze:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_True_Haze_Acceptable:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_SPE_1mm_count:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.UV_SPE_count_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Verification_Contact_Symmetry:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Vp_Pinch_Off_Voltage:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Wafer_ID:
|
|
results = Description.Param.String;
|
|
break;
|
|
//case Column.Wafer_Pocket: results = Description.Param.String; break;
|
|
case Column.Wafer_Region:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Wafer_Scribe:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.WaferPocket_Candela:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.WaferPocket_Warp:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.WaferPosition_CV:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.WaferPosition_BV:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.WaferPosition_Hall:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.WaferPosition_PR:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Warp:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.X_Coord:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_2_Theta_Peak_002:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_2_Theta_Peak_101:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_2_Theta_Position:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_2_Theta_Position_Si_1:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_2_Theta_Position_Si_2:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_2_Theta_Position_Si_3:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_Peak_002_Intensity:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_Peak_101_Intensity:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_Weekly_AL_Center:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_Weekly_Back_Barrier_Al_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_Weekly_Barrier_Al_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_Weekly_FWHM_002:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_Weekly_FWHM_101:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_Weekly_FWHM_105:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_Weekly_Fringe_thick_0_0_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_Weekly_Fringe_thick_48_48_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_Weekly_Intensity:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_Weekly_Super_Lattice_Al_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_Weekly_Super_Lattice_period:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRD_Weekly_Super_Lattice_tks:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRR_Thickness_nm_WTAVG:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.XRR_Thickness_nm_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Y_Coord:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.YellowBand_Power_mW_:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.YellowBand_V:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.YellowBand_V_XY:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.YellowBand_nm:
|
|
results = Description.Param.String;
|
|
break;
|
|
//case Column.pH: results = Description.Param.String; break;
|
|
case Column.Ag:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Al:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.As:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Au:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.B:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Ba:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Ca:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Ce:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Co:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Cr:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Cu:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Fe:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Ga:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Ge:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Hf:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.K:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Li:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Mg:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Mn:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Mo:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Na:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Ni:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.P:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Pb:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Sn:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Ta:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Ti:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.W:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Y:
|
|
results = Description.Param.String;
|
|
break;
|
|
case Column.Zn:
|
|
results = Description.Param.String;
|
|
break;
|
|
default:
|
|
throw new Exception();
|
|
}
|
|
return results;
|
|
}
|
|
|
|
}
|
|
|
|
public enum Column
|
|
{
|
|
//_8in_Total_Warp_Verification,
|
|
//AFM_Monthly_Y,
|
|
//AFM_Monthly,
|
|
AFM_Pit_Count,
|
|
AFM_Roughness,
|
|
//Adder_Bin_1,
|
|
//Adder_Bin_2,
|
|
//Adder_Bin_3,
|
|
//Adder_Bin_4,
|
|
//Adder_Bin_5,
|
|
//Adder_Bin_6,
|
|
//Adder_Bin_9,
|
|
Al_B_B_WTAVG,
|
|
Al_B_B_,
|
|
Al_Barrier_WTAVG,
|
|
Al_Barrier,
|
|
Al_SLS_WTAVG,
|
|
Al_SLS,
|
|
Al_TL1_WTAVG,
|
|
Al_TL1,
|
|
Al_TL2_WTAVG,
|
|
//BV_Resistance,
|
|
BandEdge_V,
|
|
BandEdge_V_XY,
|
|
BandEdge_nm,
|
|
Barrier_Composition_RPM_XY,
|
|
Bow_Calibration,
|
|
Bow_Range,
|
|
Bow,
|
|
BowCenter,
|
|
BowX,
|
|
BowY,
|
|
Breakdown_Voltage_Edge,
|
|
Breakdown_VoltageMiddle,
|
|
Breakdown_Voltage,
|
|
CV_C_at_10V,
|
|
CV_Nd_Min,
|
|
//Candela_Large_LPD_Quarterly,
|
|
//Candela_Medium_LPD_Quarterly,
|
|
//Candela_Small_LPD_Quarterly,
|
|
//Candela_Total_Quarterly,
|
|
Candela_102_83nm,
|
|
Candela_1_1um,
|
|
Candela_496nm,
|
|
Candela_600nm,
|
|
Candela_8620_Small,
|
|
Candela_Crack_Verification,
|
|
Candela_Cracking,
|
|
Candela_Cracking_Acceptable,
|
|
Candela_Crater,
|
|
Candela_Crater_Verification,
|
|
Candela_Haze,
|
|
Candela_LPD_Large,
|
|
Candela_LPD_Medium,
|
|
Candela_LPD_Small,
|
|
Candela_Large_Verification,
|
|
Candela_Medium_Verification,
|
|
Candela_Pits,
|
|
Candela_Pits_Verification,
|
|
Candela_SPE,
|
|
Candela_SPE_Verification,
|
|
Candela_Slip,
|
|
Candela_Small_Verification,
|
|
Candela_Spirals,
|
|
Candela_Spirals_Verification,
|
|
Candela_Total_Defects,
|
|
Candela_Total_PSL,
|
|
Candela__1_1um,
|
|
//Comment,
|
|
//Conductivity,
|
|
Contact_Symmetry,
|
|
//Cracking_verification,
|
|
//Crater_verification,
|
|
Date,
|
|
Denton_Crystal_Life,
|
|
Denton_Current_AVG,
|
|
Denton_Current_STDEV,
|
|
Denton_Deposition_Power_AVG,
|
|
Denton_Deposition_Power_STDEV,
|
|
Denton_Deposition_Rate_AVG,
|
|
Denton_Deposition_Rate_STDEV,
|
|
Denton_Gun_Pocket,
|
|
Denton_Pumpdown_Time,
|
|
Denton_Voltage_AVG,
|
|
Denton_Voltage_STDEV,
|
|
Employee,
|
|
Epi_Thickness_Mean,
|
|
Epi_Thickness_Mean_XY,
|
|
Epi_Thickness_Std_Dev_,
|
|
FWHM_006_WTAVG,
|
|
FWHM_006,
|
|
FWHM_105_WTAVG,
|
|
FWHM_105,
|
|
Hall_Rs,
|
|
Hall_Mobility_verif_sample,
|
|
Hall_Ns_verif_sample,
|
|
Hall_Rs_verif_sample,
|
|
Job,
|
|
LEI_RS_Average_value,
|
|
LEI_RS_Maximum_value,
|
|
LEI_RS_Minimum_value,
|
|
LEI_RS_STDEV,
|
|
LEI_RS_STDEV_,
|
|
//Large_Adder_Sum,
|
|
Lot,
|
|
//Medium_Adder_Sum,
|
|
Microscope_Center_50x,
|
|
Microscope_Center_5x,
|
|
Microscope_Edge_50x,
|
|
Microscope_Edge_5x,
|
|
Microscope_Middle_50x,
|
|
Microscope_Middle_5x,
|
|
Mobility_Verification,
|
|
Mobility,
|
|
Ns_Verification,
|
|
PL_Edge_Wavelength,
|
|
PL_Ratio,
|
|
PR_Barrier_Composition,
|
|
PR_Peak,
|
|
Part,
|
|
//Particles_verification,
|
|
//Pits_verification,
|
|
//Pocket,
|
|
//Post_Bin_1,
|
|
//Post_Bin_2,
|
|
//Post_Bin_3,
|
|
//Post_Bin_4,
|
|
//Post_Bin_5,
|
|
//Post_Bin_6,
|
|
//Post_Bin_9,
|
|
//Pre_Bin_1,
|
|
//Pre_Bin_2,
|
|
//Pre_Bin_3,
|
|
//Pre_Bin_4,
|
|
//Pre_Bin_5,
|
|
//Pre_Bin_6,
|
|
//Pre_Bin_9,
|
|
Process,
|
|
//RPM_verif_Thickness_1,
|
|
//RPM_verif_Thickness_2,
|
|
//RPM_verif_Thickness_3,
|
|
//RPM_verif_Thickness_Average,
|
|
//RTA_oxide_Thk_Change,
|
|
//RTA_oxide_post_anneal_Thk,
|
|
//RTA_oxide_pre_anneal_Thk,
|
|
Recipe,
|
|
//Resistivity_2_ohm_cm,
|
|
//Resistivity_600_ohm_cm,
|
|
Rs_verification,
|
|
Rs_verif_100kohm,
|
|
Rs_verif_10ohm,
|
|
Rs_verif_1kohm,
|
|
SID,
|
|
SL_Period_WTAVG,
|
|
SL_Period,
|
|
//SPE_verification,
|
|
//Sample_ID,
|
|
Sheet_Concentration,
|
|
//Size,
|
|
//Small_Adder_Sum,
|
|
//Spirals_verification,
|
|
Time,
|
|
Tool_ID,
|
|
//Total_LPD_Adder,
|
|
//Total_Verification,
|
|
Total_Warp_Calibration,
|
|
UV_Broken,
|
|
UV_Chipping,
|
|
UV_Cracking_0_3mm_,
|
|
UV_Cracking_3_7mm_,
|
|
UV_Cracking_7mm_,
|
|
UV_Crazing,
|
|
UV_Crazing_Acceptable,
|
|
UV_FULL_Characterization_Wafer,
|
|
UV_Haze_count_,
|
|
UV_LIGHT_Characterization_Wafer,
|
|
UV_Non_rotation,
|
|
UV_Other,
|
|
UV_Scratch_count_,
|
|
UV_Slip_count_,
|
|
UV_True_Haze,
|
|
UV_True_Haze_Acceptable,
|
|
UV_SPE_1mm_count,
|
|
UV_SPE_count_,
|
|
Verification_Contact_Symmetry,
|
|
Vp_Pinch_Off_Voltage,
|
|
Wafer_ID,
|
|
//Wafer_Pocket,
|
|
Wafer_Region,
|
|
Wafer_Scribe,
|
|
WaferPocket_Candela,
|
|
WaferPocket_Warp,
|
|
WaferPosition_CV,
|
|
WaferPosition_BV,
|
|
WaferPosition_Hall,
|
|
WaferPosition_PR,
|
|
Warp,
|
|
X_Coord,
|
|
XRD_2_Theta_Peak_002,
|
|
XRD_2_Theta_Peak_101,
|
|
XRD_2_Theta_Position,
|
|
XRD_2_Theta_Position_Si_1,
|
|
XRD_2_Theta_Position_Si_2,
|
|
XRD_2_Theta_Position_Si_3,
|
|
XRD_Peak_002_Intensity,
|
|
XRD_Peak_101_Intensity,
|
|
XRD_Weekly_AL_Center,
|
|
XRD_Weekly_Back_Barrier_Al_,
|
|
XRD_Weekly_Barrier_Al_,
|
|
XRD_Weekly_FWHM_002,
|
|
XRD_Weekly_FWHM_101,
|
|
XRD_Weekly_FWHM_105,
|
|
XRD_Weekly_Fringe_thick_0_0_,
|
|
XRD_Weekly_Fringe_thick_48_48_,
|
|
XRD_Weekly_Intensity,
|
|
XRD_Weekly_Super_Lattice_Al_,
|
|
XRD_Weekly_Super_Lattice_period,
|
|
XRD_Weekly_Super_Lattice_tks,
|
|
XRR_Thickness_nm_,
|
|
XRR_Thickness_nm_WTAVG,
|
|
Y_Coord,
|
|
YellowBand_Power_mW_,
|
|
YellowBand_V,
|
|
YellowBand_V_XY,
|
|
YellowBand_nm,
|
|
//pH,
|
|
Ag,
|
|
Al,
|
|
As,
|
|
Au,
|
|
B,
|
|
Ba,
|
|
Ca,
|
|
Ce,
|
|
Co,
|
|
Cr,
|
|
Cu,
|
|
Fe,
|
|
Ga,
|
|
Ge,
|
|
Hf,
|
|
K,
|
|
Li,
|
|
Mg,
|
|
Mn,
|
|
Mo,
|
|
Na,
|
|
Ni,
|
|
P,
|
|
Pb,
|
|
Sn,
|
|
Ta,
|
|
Ti,
|
|
W,
|
|
Y,
|
|
Zn
|
|
}
|
|
|
|
} |