799 lines
38 KiB
C#
799 lines
38 KiB
C#
using System;
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namespace Shared.Metrology;
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public static class ColumnGet
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{
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public static string GetDiplayName(this Column column)
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{
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string results = column switch
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{
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//case Column._8in_Total_Warp_Verification: results = "8in Total Warp Verification"; break;
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//case Column.AFM_Monthly_Y: results = "AFM-Monthly Y"; break;
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//case Column.AFM_Monthly: results = "AFM_Monthly"; break;
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Column.AFM_Pit_Count => "AFM Pit Count",
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Column.AFM_Roughness => "AFM Roughness",
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//case Column.Adder_Bin_1: results = "Adder Bin 1"; break;
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//case Column.Adder_Bin_2: results = "Adder Bin 2"; break;
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//case Column.Adder_Bin_3: results = "Adder Bin 3"; break;
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//case Column.Adder_Bin_4: results = "Adder Bin 4"; break;
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//case Column.Adder_Bin_5: results = "Adder Bin 5"; break;
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//case Column.Adder_Bin_6: results = "Adder Bin 6"; break;
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//case Column.Adder_Bin_9: results = "Adder Bin 9"; break;
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Column.Al_B_B_WTAVG => "Al% B.B. WTAVG",
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Column.Al_B_B_ => "Al% B.B.",
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Column.Al_Barrier_WTAVG => "Al% Barrier WTAVG",
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Column.Al_Barrier => "Al% Barrier",
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Column.Al_SLS_WTAVG => "Al% SLS WTAVG",
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Column.Al_SLS => "Al% SLS",
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Column.Al_TL1_WTAVG => "Al% TL1 WTAVG",
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Column.Al_TL1 => "Al% TL1",
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Column.Al_TL2_WTAVG => "Al% TL2 WTAVG",
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//case Column.BV_Resistance: results = "BV Resistance"; break; //BV Monthly Verification
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Column.BandEdge_V => "BandEdge_V",
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Column.BandEdge_V_XY => "BandEdge_V_XY",
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Column.BandEdge_nm => "BandEdge_nm",
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Column.Barrier_Composition_RPM_XY => "Barrier_Composition_RPM_XY",
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Column.Bow_Calibration => "Bow Calibration",
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Column.Bow_Range => "Bow Range",
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Column.Bow => "Bow",
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Column.BowCenter => "BowCenter",
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Column.BowX => "BowX",
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Column.BowY => "BowY",
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Column.Breakdown_Voltage_Edge => "Breakdown Voltage - Edge",
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Column.Breakdown_VoltageMiddle => "Breakdown Voltage - Middle",
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Column.Breakdown_Voltage => "Breakdown Voltage",
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Column.CV_C_at_10V => "CV C at -10V",
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Column.CV_Nd_Min => "CV Nd Min",
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//case Column.Candela_Large_LPD_Quarterly: results = "Candela Large LPD Quarterly"; break;
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//case Column.Candela_Medium_LPD_Quarterly: results = "Candela Medium LPD Quarterly"; break;
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//case Column.Candela_Small_LPD_Quarterly: results = "Candela Small LPD Quarterly"; break;
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//case Column.Candela_Total_Quarterly: results = "Candela Total Quarterly"; break;
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Column.Candela_102_83nm => "102-83nm",
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Column.Candela_1_1um => "1.1um",
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Column.Candela_496nm => "496nm",
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Column.Candela_600nm => "600nm",
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Column.Candela_8620_Small => "Candela 8620 Small",
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Column.Candela_Crack_Verification => "Crack Verification",
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Column.Candela_Cracking => "Candela Cracking",
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Column.Candela_Cracking_Acceptable => "Candela Cracking Acceptable",
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Column.Candela_Crater => "Candela Crater",
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Column.Candela_Crater_Verification => "Crater verification",
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Column.Candela_Haze => "Candela Haze",
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Column.Candela_LPD_Large => "Candela LPD Large",
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Column.Candela_LPD_Medium => "Candela LPD Medium",
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Column.Candela_LPD_Small => "Candela LPD Small",
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Column.Candela_Large_Verification => "Large Verification",
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Column.Candela_Medium_Verification => "Medium Verification",
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Column.Candela_Pits => "Candela Pits",
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Column.Candela_Pits_Verification => "Pits verification",
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Column.Candela_SPE => "Candela SPE",
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Column.Candela_SPE_Verification => "SPE verification",
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Column.Candela_Slip => "Candela Slip",
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Column.Candela_Small_Verification => "Small Verification",
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Column.Candela_Spirals => "Candela Spirals",
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Column.Candela_Spirals_Verification => "Candela Spirals Verification",
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Column.Candela_Total_Defects => "Candela Total Defects",
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Column.Candela_Total_PSL => "Candela Total PSL",
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Column.Candela__1_1um => ">1.1um",
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//case Column.Comment: results = "Comment"; break;
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//case Column.Conductivity: results = "Conductivity"; break;
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Column.Contact_Symmetry => "Contact Symmetry",
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//case Column.Cracking_verification: results = "Cracking verification"; break;
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//case Column.Crater_verification: results = "Crater verification"; break;
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Column.Date => "Date",
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Column.Denton_Crystal_Life => "Denton_Crystal_Life",
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Column.Denton_Current_AVG => "Denton_Current_AVG",
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Column.Denton_Current_STDEV => "Denton_Current_STDEV",
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Column.Denton_Deposition_Power_AVG => "Denton_Deposition_Power_AVG",
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Column.Denton_Deposition_Power_STDEV => "Denton_Deposition_Power_STDEV",
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Column.Denton_Deposition_Rate_AVG => "Denton_Deposition_Rate_AVG",
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Column.Denton_Deposition_Rate_STDEV => "Denton_Deposition_Rate_STDEV",
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Column.Denton_Gun_Pocket => "Denton_Gun_Pocket",
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Column.Denton_Pumpdown_Time => "Denton_Pumpdown_Time",
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Column.Denton_Voltage_AVG => "Denton_Voltage_AVG",
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Column.Denton_Voltage_STDEV => "Denton_Voltage_STDEV",
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Column.Employee => "Employee",
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Column.Epi_Thickness_Mean => "Epi Thickness Mean",
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Column.Epi_Thickness_Mean_XY => "Epi Thickness Mean_XY",
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Column.Epi_Thickness_Std_Dev_ => "Epi Thickness Std Dev %",
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Column.FWHM_006_WTAVG => "FWHM 006 WTAVG",
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Column.FWHM_006 => "FWHM 006",
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Column.FWHM_105_WTAVG => "FWHM 105 WTAVG",
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Column.FWHM_105 => "FWHM 105",
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Column.Hall_Rs => "Hall Rs",
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Column.Hall_Mobility_verif_sample => "Hall_Mobility_verif_sample",
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Column.Hall_Ns_verif_sample => "Hall_Ns_verif_sample",
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Column.Hall_Rs_verif_sample => "Hall_Rs_verif_sample",
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Column.Job => "Job",
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Column.LEI_RS_Average_value => "LEI RS Average value",
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Column.LEI_RS_Maximum_value => "LEI RS Maximum value",
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Column.LEI_RS_Minimum_value => "LEI RS Minimum value",
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Column.LEI_RS_STDEV => "LEI RS STDEV",
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Column.LEI_RS_STDEV_ => "LEI RS STDEV%",
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//case Column.Large_Adder_Sum: results = "Large Adder Sum"; break;
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Column.Lot => "Lot",
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//case Column.Medium_Adder_Sum: results = "Medium Adder Sum"; break;
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Column.Microscope_Center_5x => "Microscope Center 5x",
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Column.Microscope_Center_50x => "Microscope Center 50x",
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Column.Microscope_Middle_5x => "Microscope Middle 5x",
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Column.Microscope_Middle_50x => "Microscope Middle 50x",
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Column.Microscope_Edge_5x => "Microscope Edge 5x",
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Column.Microscope_Edge_50x => "Microscope Edge 50x",
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Column.Mobility_Verification => "Mobility Verification",
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Column.Mobility => "Mobility",
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Column.Ns_Verification => "Ns Verification",
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Column.PL_Edge_Wavelength => "PL Edge Wavelength",
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Column.PL_Ratio => "PL Ratio",
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Column.PR_Barrier_Composition => "PR Barrier Composition",
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Column.PR_Peak => "PR Peak",
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Column.Part => "Part",
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//case Column.Particles_verification: results = "Particles verification"; break;
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//case Column.Pits_verification: results = "Pits verification"; break;
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//case Column.Pocket: results = "Pocket"; break;
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//case Column.Post_Bin_1: results = "Post Bin 1"; break;
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//case Column.Post_Bin_2: results = "Post Bin 2"; break;
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//case Column.Post_Bin_3: results = "Post Bin 3"; break;
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//case Column.Post_Bin_4: results = "Post Bin 4"; break;
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//case Column.Post_Bin_5: results = "Post Bin 5"; break;
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//case Column.Post_Bin_6: results = "Post Bin 6"; break;
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//case Column.Post_Bin_9: results = "Post Bin 9"; break;
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//case Column.Pre_Bin_1: results = "Pre Bin 1"; break;
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//case Column.Pre_Bin_2: results = "Pre Bin 2"; break;
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//case Column.Pre_Bin_3: results = "Pre Bin 3"; break;
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//case Column.Pre_Bin_4: results = "Pre Bin 4"; break;
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//case Column.Pre_Bin_5: results = "Pre Bin 5"; break;
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//case Column.Pre_Bin_6: results = "Pre Bin 6"; break;
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//case Column.Pre_Bin_9: results = "Pre Bin 9"; break;
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Column.Process => "Process",
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//case Column.RPM_verif_Thickness_1: results = "RPM_verif_Thickness_1"; break;
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//case Column.RPM_verif_Thickness_2: results = "RPM_verif_Thickness_2"; break;
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//case Column.RPM_verif_Thickness_3: results = "RPM_verif_Thickness_3"; break;
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//case Column.RPM_verif_Thickness_Average: results = "RPM_verif_Thickness_Average"; break;
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//case Column.RTA_oxide_Thk_Change: results = "RTA oxide Thk Change"; break;
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//case Column.RTA_oxide_post_anneal_Thk: results = "RTA oxide post-anneal Thk"; break;
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//case Column.RTA_oxide_pre_anneal_Thk: results = "RTA oxide pre-anneal Thk"; break;
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Column.Recipe => "Recipe",
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//case Column.Resistivity_2_ohm_cm: results = "Resistivity 2 ohm cm"; break; //LEI Weekly Verification
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//case Column.Resistivity_600_ohm_cm: results = "Resistivity 600 ohm cm"; break; //LEI Weekly Verification
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Column.Rs_verification => "Rs verification",
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Column.Rs_verif_100kohm => "Rs_verif_100kohm",
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Column.Rs_verif_10ohm => "Rs_verif_10ohm",
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Column.Rs_verif_1kohm => "Rs_verif_1kohm",
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Column.SID => "SID",
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Column.SL_Period_WTAVG => "SL Period WTAVG",
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Column.SL_Period => "SL Period",
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//case Column.SPE_verification: results = "SPE verification"; break;
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//case Column.Sample_ID: results = "Sample ID"; break;
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Column.Sheet_Concentration => "Sheet Concentration",
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//case Column.Size: results = "Size"; break;
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//case Column.Small_Adder_Sum: results = "Small Adder Sum"; break;
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//case Column.Spirals_verification: results = "Spirals verification"; break;
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Column.Time => "Time",
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Column.Tool_ID => "Tool ID",
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//case Column.Total_LPD_Adder: results = "Total LPD Adder"; break;
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//case Column.Total_Verification: results = "Total Verification"; break;
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Column.Total_Warp_Calibration => "Total Warp Calibration",
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Column.UV_Broken => "UV Broken",
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Column.UV_Chipping => "UV Chipping",
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Column.UV_Cracking_0_3mm_ => "UV Cracking (0-3mm)",
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Column.UV_Cracking_3_7mm_ => "UV Cracking (3-7mm)",
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Column.UV_Cracking_7mm_ => "UV Cracking (>7mm)",
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Column.UV_Crazing => "UV Crazing",
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Column.UV_Crazing_Acceptable => "UV Crazing Acceptable",
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Column.UV_FULL_Characterization_Wafer => "UV FULL Characterization Wafer",
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Column.UV_Haze_count_ => "UV Haze (count)",
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Column.UV_LIGHT_Characterization_Wafer => "UV LIGHT Characterization Wafer",
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Column.UV_Non_rotation => "UV Non-rotation",
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Column.UV_Other => "UV Other",
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Column.UV_Scratch_count_ => "UV Scratch (count)",
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Column.UV_Slip_count_ => "UV Slip (count)",
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Column.UV_True_Haze => "UV True Haze",
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Column.UV_True_Haze_Acceptable => "UV True Haze Acceptable",
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Column.UV_SPE_1mm_count => "UV-SPE (>1mm) count",
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Column.UV_SPE_count_ => "UV-SPE (count)",
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Column.Verification_Contact_Symmetry => "Verification Contact Symmetry",
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Column.Vp_Pinch_Off_Voltage => "Vp Pinch Off Voltage",
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Column.Wafer_ID => "Wafer ID",
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//case Column.Wafer_Pocket: results = "Wafer Pocket"; break;
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Column.Wafer_Region => "Wafer Region",
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Column.Wafer_Scribe => "Wafer Scribe",
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Column.WaferPocket_Candela => "WaferPocket_Candela",
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Column.WaferPocket_Warp => "WaferPocket_Warp",
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Column.WaferPosition_CV => "WaferPosition_CV",
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Column.WaferPosition_BV => "WaferPosition_BV",
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Column.WaferPosition_Hall => "WaferPosition_Hall",
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Column.WaferPosition_PR => "WaferPosition_PR",
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Column.Warp => "Warp",
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Column.X_Coord => "X-Coord",
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Column.XRD_2_Theta_Peak_002 => "XRD 2 Theta Peak 002",
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Column.XRD_2_Theta_Peak_101 => "XRD 2 Theta Peak 101",
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Column.XRD_2_Theta_Position => "XRD 2-Theta Position",
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Column.XRD_2_Theta_Position_Si_1 => "XRD 2-Theta Position Si 1",
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Column.XRD_2_Theta_Position_Si_2 => "XRD 2-Theta Position Si 2",
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Column.XRD_2_Theta_Position_Si_3 => "XRD 2-Theta Position Si 3",
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Column.XRD_Peak_002_Intensity => "XRD Peak 002 Intensity",
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Column.XRD_Peak_101_Intensity => "XRD Peak 101 Intensity",
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Column.XRD_Weekly_AL_Center => "XRD Weekly AL% Center",
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Column.XRD_Weekly_Back_Barrier_Al_ => "Back Barrier Al%",
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Column.XRD_Weekly_Barrier_Al_ => "Barrier Al%",
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Column.XRD_Weekly_FWHM_002 => "XRD Weekly FWHM 002",
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Column.XRD_Weekly_FWHM_101 => "XRD Weekly FWHM 101",
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Column.XRD_Weekly_FWHM_105 => "XRD Weekly FWHM 105",
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Column.XRD_Weekly_Fringe_thick_0_0_ => "XRD Weekly Fringe thick (0,0)",
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Column.XRD_Weekly_Fringe_thick_48_48_ => "XRD Weekly Fringe thick (48,48)",
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Column.XRD_Weekly_Intensity => "XRD Weekly Intensity",
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Column.XRD_Weekly_Super_Lattice_Al_ => "Super Lattice Al%",
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Column.XRD_Weekly_Super_Lattice_period => "Super Lattice period",
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Column.XRD_Weekly_Super_Lattice_tks => "Super Lattice tks",
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Column.XRR_Thickness_nm_WTAVG => "XRR Thickness (nm) WTAVG",
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Column.XRR_Thickness_nm_ => "XRR Thickness (nm)",
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Column.Y_Coord => "Y-Coord",
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Column.YellowBand_Power_mW_ => "YellowBand_Power (mW)",
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Column.YellowBand_V => "YellowBand_V",
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Column.YellowBand_V_XY => "YellowBand_V_XY",
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Column.YellowBand_nm => "YellowBand_nm",
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//case Column.pH: results = "pH"; break;
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Column.Ag => "Ag",
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Column.Al => "Al",
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Column.As => "As",
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Column.Au => "Au",
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Column.B => "B",
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Column.Ba => "Ba",
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Column.Ca => "Ca",
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Column.Ce => "Ce",
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Column.Co => "Co",
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Column.Cr => "Cr",
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Column.Cu => "Cu",
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Column.Fe => "Fe",
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Column.Ga => "Ga",
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Column.Ge => "Ge",
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Column.Hf => "Hf",
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Column.K => "K",
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Column.Li => "Li",
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Column.Mg => "Mg",
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Column.Mn => "Mn",
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Column.Mo => "Mo",
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Column.Na => "Na",
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Column.Ni => "Ni",
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Column.P => "P",
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Column.Pb => "Pb",
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Column.Sn => "Sn",
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Column.Ta => "Ta",
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Column.Ti => "Ti",
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Column.W => "W",
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Column.Y => "Y",
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Column.Zn => "Zn",
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_ => throw new Exception(),
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};
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return results;
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}
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public static Description.Param GetParam(this Column column)
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{
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var results = column switch
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{
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//case Column._8in_Total_Warp_Verification: results = Description.Param.String; break;
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//case Column.AFM_Monthly_Y: results = Description.Param.String; break;
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//case Column.AFM_Monthly: results = Description.Param.String; break;
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Column.AFM_Pit_Count => Description.Param.String,
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Column.AFM_Roughness => Description.Param.String,
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//case Column.Adder_Bin_1: results = Description.Param.String; break;
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//case Column.Adder_Bin_2: results = Description.Param.String; break;
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//case Column.Adder_Bin_3: results = Description.Param.String; break;
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//case Column.Adder_Bin_4: results = Description.Param.String; break;
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//case Column.Adder_Bin_5: results = Description.Param.String; break;
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//case Column.Adder_Bin_6: results = Description.Param.String; break;
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//case Column.Adder_Bin_9: results = Description.Param.String; break;
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Column.Al_B_B_WTAVG => Description.Param.String,
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Column.Al_B_B_ => Description.Param.String,
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Column.Al_Barrier_WTAVG => Description.Param.String,
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Column.Al_Barrier => Description.Param.String,
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Column.Al_SLS_WTAVG => Description.Param.String,
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Column.Al_SLS => Description.Param.String,
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Column.Al_TL1_WTAVG => Description.Param.String,
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Column.Al_TL1 => Description.Param.String,
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Column.Al_TL2_WTAVG => Description.Param.String,
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//case Column.BV_Resistance: results = Description.Param.String; break;
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Column.BandEdge_V => Description.Param.String,
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Column.BandEdge_V_XY => Description.Param.String,
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Column.BandEdge_nm => Description.Param.String,
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Column.Barrier_Composition_RPM_XY => Description.Param.String,
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Column.Bow_Calibration => Description.Param.String,
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Column.Bow_Range => Description.Param.String,
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Column.Bow => Description.Param.String,
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Column.BowCenter => Description.Param.String,
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Column.BowX => Description.Param.String,
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Column.BowY => Description.Param.String,
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Column.Breakdown_Voltage_Edge => Description.Param.String,
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Column.Breakdown_VoltageMiddle => Description.Param.String,
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Column.Breakdown_Voltage => Description.Param.String,
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Column.CV_C_at_10V => Description.Param.String,
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Column.CV_Nd_Min => Description.Param.String,
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//case Column.Candela_Large_LPD_Quarterly: results = Description.Param.String; break;
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//case Column.Candela_Medium_LPD_Quarterly: results = Description.Param.String; break;
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//case Column.Candela_Small_LPD_Quarterly: results = Description.Param.String; break;
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//case Column.Candela_Total_Quarterly: results = Description.Param.String; break;
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Column.Candela_102_83nm => Description.Param.String,
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Column.Candela_1_1um => Description.Param.String,
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Column.Candela_496nm => Description.Param.String,
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Column.Candela_600nm => Description.Param.String,
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Column.Candela_8620_Small => Description.Param.String,
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Column.Candela_Crack_Verification => Description.Param.String,
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Column.Candela_Cracking => Description.Param.String,
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Column.Candela_Cracking_Acceptable => Description.Param.String,
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Column.Candela_Crater => Description.Param.String,
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Column.Candela_Crater_Verification => Description.Param.String,
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Column.Candela_Haze => Description.Param.String,
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Column.Candela_LPD_Large => Description.Param.String,
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Column.Candela_LPD_Medium => Description.Param.String,
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Column.Candela_LPD_Small => Description.Param.String,
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Column.Candela_Large_Verification => Description.Param.String,
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Column.Candela_Medium_Verification => Description.Param.String,
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Column.Candela_Pits => Description.Param.String,
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Column.Candela_Pits_Verification => Description.Param.String,
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Column.Candela_SPE => Description.Param.String,
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Column.Candela_SPE_Verification => Description.Param.String,
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Column.Candela_Slip => Description.Param.String,
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Column.Candela_Small_Verification => Description.Param.String,
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Column.Candela_Spirals => Description.Param.String,
|
|
Column.Candela_Spirals_Verification => Description.Param.String,
|
|
Column.Candela_Total_Defects => Description.Param.String,
|
|
Column.Candela_Total_PSL => Description.Param.String,
|
|
Column.Candela__1_1um => Description.Param.String,
|
|
//case Column.Comment: results = Description.Param.String; break;
|
|
//case Column.Conductivity: results = Description.Param.String; break;
|
|
Column.Contact_Symmetry => Description.Param.String,
|
|
//case Column.Cracking_verification: results = Description.Param.String; break;
|
|
//case Column.Crater_verification: results = Description.Param.String; break;
|
|
Column.Date => Description.Param.String,
|
|
Column.Denton_Crystal_Life => Description.Param.String,
|
|
Column.Denton_Current_AVG => Description.Param.String,
|
|
Column.Denton_Current_STDEV => Description.Param.String,
|
|
Column.Denton_Deposition_Power_AVG => Description.Param.String,
|
|
Column.Denton_Deposition_Power_STDEV => Description.Param.String,
|
|
Column.Denton_Deposition_Rate_AVG => Description.Param.String,
|
|
Column.Denton_Deposition_Rate_STDEV => Description.Param.String,
|
|
Column.Denton_Gun_Pocket => Description.Param.String,
|
|
Column.Denton_Pumpdown_Time => Description.Param.String,
|
|
Column.Denton_Voltage_AVG => Description.Param.String,
|
|
Column.Denton_Voltage_STDEV => Description.Param.String,
|
|
Column.Employee => Description.Param.String,
|
|
Column.Epi_Thickness_Mean => Description.Param.String,
|
|
Column.Epi_Thickness_Mean_XY => Description.Param.String,
|
|
Column.Epi_Thickness_Std_Dev_ => Description.Param.String,
|
|
Column.FWHM_006_WTAVG => Description.Param.String,
|
|
Column.FWHM_006 => Description.Param.String,
|
|
Column.FWHM_105_WTAVG => Description.Param.String,
|
|
Column.FWHM_105 => Description.Param.String,
|
|
Column.Hall_Rs => Description.Param.String,
|
|
Column.Hall_Mobility_verif_sample => Description.Param.String,
|
|
Column.Hall_Ns_verif_sample => Description.Param.String,
|
|
Column.Hall_Rs_verif_sample => Description.Param.String,
|
|
Column.Job => Description.Param.String,
|
|
Column.LEI_RS_Average_value => Description.Param.String,
|
|
Column.LEI_RS_Maximum_value => Description.Param.String,
|
|
Column.LEI_RS_Minimum_value => Description.Param.String,
|
|
Column.LEI_RS_STDEV => Description.Param.String,
|
|
Column.LEI_RS_STDEV_ => Description.Param.String,
|
|
//case Column.Large_Adder_Sum: results = Description.Param.String; break;
|
|
Column.Lot => Description.Param.String,
|
|
//case Column.Medium_Adder_Sum: results = Description.Param.String; break;
|
|
Column.Microscope_Center_5x => Description.Param.String,
|
|
Column.Microscope_Center_50x => Description.Param.String,
|
|
Column.Microscope_Middle_5x => Description.Param.String,
|
|
Column.Microscope_Middle_50x => Description.Param.String,
|
|
Column.Microscope_Edge_5x => Description.Param.String,
|
|
Column.Microscope_Edge_50x => Description.Param.String,
|
|
Column.Mobility_Verification => Description.Param.String,
|
|
Column.Mobility => Description.Param.String,
|
|
Column.Ns_Verification => Description.Param.String,
|
|
Column.PL_Edge_Wavelength => Description.Param.String,
|
|
Column.PL_Ratio => Description.Param.String,
|
|
Column.PR_Barrier_Composition => Description.Param.String,
|
|
Column.PR_Peak => Description.Param.String,
|
|
Column.Part => Description.Param.String,
|
|
//case Column.Particles_verification: results = Description.Param.String; break;
|
|
//case Column.Pits_verification: results = Description.Param.String; break;
|
|
//case Column.Pocket: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_1: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_2: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_3: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_4: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_5: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_6: results = Description.Param.String; break;
|
|
//case Column.Post_Bin_9: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_1: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_2: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_3: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_4: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_5: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_6: results = Description.Param.String; break;
|
|
//case Column.Pre_Bin_9: results = Description.Param.String; break;
|
|
Column.Process => Description.Param.String,
|
|
//case Column.RPM_verif_Thickness_1: results = Description.Param.String; break;
|
|
//case Column.RPM_verif_Thickness_2: results = Description.Param.String; break;
|
|
//case Column.RPM_verif_Thickness_3: results = Description.Param.String; break;
|
|
//case Column.RPM_verif_Thickness_Average: results = Description.Param.String; break;
|
|
//case Column.RTA_oxide_Thk_Change: results = Description.Param.String; break;
|
|
//case Column.RTA_oxide_post_anneal_Thk: results = Description.Param.String; break;
|
|
//case Column.RTA_oxide_pre_anneal_Thk: results = Description.Param.String; break;
|
|
Column.Recipe => Description.Param.String,
|
|
//case Column.Resistivity_2_ohm_cm: results = Description.Param.String; break;
|
|
//case Column.Resistivity_600_ohm_cm: results = Description.Param.String; break;
|
|
Column.Rs_verification => Description.Param.String,
|
|
Column.Rs_verif_100kohm => Description.Param.String,
|
|
Column.Rs_verif_10ohm => Description.Param.String,
|
|
Column.Rs_verif_1kohm => Description.Param.String,
|
|
Column.SID => Description.Param.String,
|
|
Column.SL_Period_WTAVG => Description.Param.String,
|
|
Column.SL_Period => Description.Param.String,
|
|
//case Column.SPE_verification: results = Description.Param.String; break;
|
|
//case Column.Sample_ID: results = Description.Param.String; break;
|
|
Column.Sheet_Concentration => Description.Param.String,
|
|
//case Column.Size: results = Description.Param.String; break;
|
|
//case Column.Small_Adder_Sum: results = Description.Param.String; break;
|
|
//case Column.Spirals_verification: results = Description.Param.String; break;
|
|
Column.Time => Description.Param.String,
|
|
Column.Tool_ID => Description.Param.String,
|
|
//case Column.Total_LPD_Adder: results = Description.Param.String; break;
|
|
//case Column.Total_Verification: results = Description.Param.String; break;
|
|
Column.Total_Warp_Calibration => Description.Param.String,
|
|
Column.UV_Broken => Description.Param.String,
|
|
Column.UV_Chipping => Description.Param.String,
|
|
Column.UV_Cracking_0_3mm_ => Description.Param.String,
|
|
Column.UV_Cracking_3_7mm_ => Description.Param.String,
|
|
Column.UV_Cracking_7mm_ => Description.Param.String,
|
|
Column.UV_Crazing => Description.Param.String,
|
|
Column.UV_Crazing_Acceptable => Description.Param.String,
|
|
Column.UV_FULL_Characterization_Wafer => Description.Param.String,
|
|
Column.UV_Haze_count_ => Description.Param.String,
|
|
Column.UV_LIGHT_Characterization_Wafer => Description.Param.String,
|
|
Column.UV_Non_rotation => Description.Param.String,
|
|
Column.UV_Other => Description.Param.String,
|
|
Column.UV_Scratch_count_ => Description.Param.String,
|
|
Column.UV_Slip_count_ => Description.Param.String,
|
|
Column.UV_True_Haze => Description.Param.String,
|
|
Column.UV_True_Haze_Acceptable => Description.Param.String,
|
|
Column.UV_SPE_1mm_count => Description.Param.String,
|
|
Column.UV_SPE_count_ => Description.Param.String,
|
|
Column.Verification_Contact_Symmetry => Description.Param.String,
|
|
Column.Vp_Pinch_Off_Voltage => Description.Param.String,
|
|
Column.Wafer_ID => Description.Param.String,
|
|
//case Column.Wafer_Pocket: results = Description.Param.String; break;
|
|
Column.Wafer_Region => Description.Param.String,
|
|
Column.Wafer_Scribe => Description.Param.String,
|
|
Column.WaferPocket_Candela => Description.Param.String,
|
|
Column.WaferPocket_Warp => Description.Param.String,
|
|
Column.WaferPosition_CV => Description.Param.String,
|
|
Column.WaferPosition_BV => Description.Param.String,
|
|
Column.WaferPosition_Hall => Description.Param.String,
|
|
Column.WaferPosition_PR => Description.Param.String,
|
|
Column.Warp => Description.Param.String,
|
|
Column.X_Coord => Description.Param.String,
|
|
Column.XRD_2_Theta_Peak_002 => Description.Param.String,
|
|
Column.XRD_2_Theta_Peak_101 => Description.Param.String,
|
|
Column.XRD_2_Theta_Position => Description.Param.String,
|
|
Column.XRD_2_Theta_Position_Si_1 => Description.Param.String,
|
|
Column.XRD_2_Theta_Position_Si_2 => Description.Param.String,
|
|
Column.XRD_2_Theta_Position_Si_3 => Description.Param.String,
|
|
Column.XRD_Peak_002_Intensity => Description.Param.String,
|
|
Column.XRD_Peak_101_Intensity => Description.Param.String,
|
|
Column.XRD_Weekly_AL_Center => Description.Param.String,
|
|
Column.XRD_Weekly_Back_Barrier_Al_ => Description.Param.String,
|
|
Column.XRD_Weekly_Barrier_Al_ => Description.Param.String,
|
|
Column.XRD_Weekly_FWHM_002 => Description.Param.String,
|
|
Column.XRD_Weekly_FWHM_101 => Description.Param.String,
|
|
Column.XRD_Weekly_FWHM_105 => Description.Param.String,
|
|
Column.XRD_Weekly_Fringe_thick_0_0_ => Description.Param.String,
|
|
Column.XRD_Weekly_Fringe_thick_48_48_ => Description.Param.String,
|
|
Column.XRD_Weekly_Intensity => Description.Param.String,
|
|
Column.XRD_Weekly_Super_Lattice_Al_ => Description.Param.String,
|
|
Column.XRD_Weekly_Super_Lattice_period => Description.Param.String,
|
|
Column.XRD_Weekly_Super_Lattice_tks => Description.Param.String,
|
|
Column.XRR_Thickness_nm_WTAVG => Description.Param.String,
|
|
Column.XRR_Thickness_nm_ => Description.Param.String,
|
|
Column.Y_Coord => Description.Param.String,
|
|
Column.YellowBand_Power_mW_ => Description.Param.String,
|
|
Column.YellowBand_V => Description.Param.String,
|
|
Column.YellowBand_V_XY => Description.Param.String,
|
|
Column.YellowBand_nm => Description.Param.String,
|
|
//case Column.pH: results = Description.Param.String; break;
|
|
Column.Ag => Description.Param.String,
|
|
Column.Al => Description.Param.String,
|
|
Column.As => Description.Param.String,
|
|
Column.Au => Description.Param.String,
|
|
Column.B => Description.Param.String,
|
|
Column.Ba => Description.Param.String,
|
|
Column.Ca => Description.Param.String,
|
|
Column.Ce => Description.Param.String,
|
|
Column.Co => Description.Param.String,
|
|
Column.Cr => Description.Param.String,
|
|
Column.Cu => Description.Param.String,
|
|
Column.Fe => Description.Param.String,
|
|
Column.Ga => Description.Param.String,
|
|
Column.Ge => Description.Param.String,
|
|
Column.Hf => Description.Param.String,
|
|
Column.K => Description.Param.String,
|
|
Column.Li => Description.Param.String,
|
|
Column.Mg => Description.Param.String,
|
|
Column.Mn => Description.Param.String,
|
|
Column.Mo => Description.Param.String,
|
|
Column.Na => Description.Param.String,
|
|
Column.Ni => Description.Param.String,
|
|
Column.P => Description.Param.String,
|
|
Column.Pb => Description.Param.String,
|
|
Column.Sn => Description.Param.String,
|
|
Column.Ta => Description.Param.String,
|
|
Column.Ti => Description.Param.String,
|
|
Column.W => Description.Param.String,
|
|
Column.Y => Description.Param.String,
|
|
Column.Zn => Description.Param.String,
|
|
_ => throw new Exception(),
|
|
};
|
|
return results;
|
|
}
|
|
|
|
}
|
|
|
|
public enum Column
|
|
{
|
|
//_8in_Total_Warp_Verification,
|
|
//AFM_Monthly_Y,
|
|
//AFM_Monthly,
|
|
AFM_Pit_Count,
|
|
AFM_Roughness,
|
|
//Adder_Bin_1,
|
|
//Adder_Bin_2,
|
|
//Adder_Bin_3,
|
|
//Adder_Bin_4,
|
|
//Adder_Bin_5,
|
|
//Adder_Bin_6,
|
|
//Adder_Bin_9,
|
|
Al_B_B_WTAVG,
|
|
Al_B_B_,
|
|
Al_Barrier_WTAVG,
|
|
Al_Barrier,
|
|
Al_SLS_WTAVG,
|
|
Al_SLS,
|
|
Al_TL1_WTAVG,
|
|
Al_TL1,
|
|
Al_TL2_WTAVG,
|
|
//BV_Resistance,
|
|
BandEdge_V,
|
|
BandEdge_V_XY,
|
|
BandEdge_nm,
|
|
Barrier_Composition_RPM_XY,
|
|
Bow_Calibration,
|
|
Bow_Range,
|
|
Bow,
|
|
BowCenter,
|
|
BowX,
|
|
BowY,
|
|
Breakdown_Voltage_Edge,
|
|
Breakdown_VoltageMiddle,
|
|
Breakdown_Voltage,
|
|
CV_C_at_10V,
|
|
CV_Nd_Min,
|
|
//Candela_Large_LPD_Quarterly,
|
|
//Candela_Medium_LPD_Quarterly,
|
|
//Candela_Small_LPD_Quarterly,
|
|
//Candela_Total_Quarterly,
|
|
Candela_102_83nm,
|
|
Candela_1_1um,
|
|
Candela_496nm,
|
|
Candela_600nm,
|
|
Candela_8620_Small,
|
|
Candela_Crack_Verification,
|
|
Candela_Cracking,
|
|
Candela_Cracking_Acceptable,
|
|
Candela_Crater,
|
|
Candela_Crater_Verification,
|
|
Candela_Haze,
|
|
Candela_LPD_Large,
|
|
Candela_LPD_Medium,
|
|
Candela_LPD_Small,
|
|
Candela_Large_Verification,
|
|
Candela_Medium_Verification,
|
|
Candela_Pits,
|
|
Candela_Pits_Verification,
|
|
Candela_SPE,
|
|
Candela_SPE_Verification,
|
|
Candela_Slip,
|
|
Candela_Small_Verification,
|
|
Candela_Spirals,
|
|
Candela_Spirals_Verification,
|
|
Candela_Total_Defects,
|
|
Candela_Total_PSL,
|
|
Candela__1_1um,
|
|
//Comment,
|
|
//Conductivity,
|
|
Contact_Symmetry,
|
|
//Cracking_verification,
|
|
//Crater_verification,
|
|
Date,
|
|
Denton_Crystal_Life,
|
|
Denton_Current_AVG,
|
|
Denton_Current_STDEV,
|
|
Denton_Deposition_Power_AVG,
|
|
Denton_Deposition_Power_STDEV,
|
|
Denton_Deposition_Rate_AVG,
|
|
Denton_Deposition_Rate_STDEV,
|
|
Denton_Gun_Pocket,
|
|
Denton_Pumpdown_Time,
|
|
Denton_Voltage_AVG,
|
|
Denton_Voltage_STDEV,
|
|
Employee,
|
|
Epi_Thickness_Mean,
|
|
Epi_Thickness_Mean_XY,
|
|
Epi_Thickness_Std_Dev_,
|
|
FWHM_006_WTAVG,
|
|
FWHM_006,
|
|
FWHM_105_WTAVG,
|
|
FWHM_105,
|
|
Hall_Rs,
|
|
Hall_Mobility_verif_sample,
|
|
Hall_Ns_verif_sample,
|
|
Hall_Rs_verif_sample,
|
|
Job,
|
|
LEI_RS_Average_value,
|
|
LEI_RS_Maximum_value,
|
|
LEI_RS_Minimum_value,
|
|
LEI_RS_STDEV,
|
|
LEI_RS_STDEV_,
|
|
//Large_Adder_Sum,
|
|
Lot,
|
|
//Medium_Adder_Sum,
|
|
Microscope_Center_50x,
|
|
Microscope_Center_5x,
|
|
Microscope_Edge_50x,
|
|
Microscope_Edge_5x,
|
|
Microscope_Middle_50x,
|
|
Microscope_Middle_5x,
|
|
Mobility_Verification,
|
|
Mobility,
|
|
Ns_Verification,
|
|
PL_Edge_Wavelength,
|
|
PL_Ratio,
|
|
PR_Barrier_Composition,
|
|
PR_Peak,
|
|
Part,
|
|
//Particles_verification,
|
|
//Pits_verification,
|
|
//Pocket,
|
|
//Post_Bin_1,
|
|
//Post_Bin_2,
|
|
//Post_Bin_3,
|
|
//Post_Bin_4,
|
|
//Post_Bin_5,
|
|
//Post_Bin_6,
|
|
//Post_Bin_9,
|
|
//Pre_Bin_1,
|
|
//Pre_Bin_2,
|
|
//Pre_Bin_3,
|
|
//Pre_Bin_4,
|
|
//Pre_Bin_5,
|
|
//Pre_Bin_6,
|
|
//Pre_Bin_9,
|
|
Process,
|
|
//RPM_verif_Thickness_1,
|
|
//RPM_verif_Thickness_2,
|
|
//RPM_verif_Thickness_3,
|
|
//RPM_verif_Thickness_Average,
|
|
//RTA_oxide_Thk_Change,
|
|
//RTA_oxide_post_anneal_Thk,
|
|
//RTA_oxide_pre_anneal_Thk,
|
|
Recipe,
|
|
//Resistivity_2_ohm_cm,
|
|
//Resistivity_600_ohm_cm,
|
|
Rs_verification,
|
|
Rs_verif_100kohm,
|
|
Rs_verif_10ohm,
|
|
Rs_verif_1kohm,
|
|
SID,
|
|
SL_Period_WTAVG,
|
|
SL_Period,
|
|
//SPE_verification,
|
|
//Sample_ID,
|
|
Sheet_Concentration,
|
|
//Size,
|
|
//Small_Adder_Sum,
|
|
//Spirals_verification,
|
|
Time,
|
|
Tool_ID,
|
|
//Total_LPD_Adder,
|
|
//Total_Verification,
|
|
Total_Warp_Calibration,
|
|
UV_Broken,
|
|
UV_Chipping,
|
|
UV_Cracking_0_3mm_,
|
|
UV_Cracking_3_7mm_,
|
|
UV_Cracking_7mm_,
|
|
UV_Crazing,
|
|
UV_Crazing_Acceptable,
|
|
UV_FULL_Characterization_Wafer,
|
|
UV_Haze_count_,
|
|
UV_LIGHT_Characterization_Wafer,
|
|
UV_Non_rotation,
|
|
UV_Other,
|
|
UV_Scratch_count_,
|
|
UV_Slip_count_,
|
|
UV_True_Haze,
|
|
UV_True_Haze_Acceptable,
|
|
UV_SPE_1mm_count,
|
|
UV_SPE_count_,
|
|
Verification_Contact_Symmetry,
|
|
Vp_Pinch_Off_Voltage,
|
|
Wafer_ID,
|
|
//Wafer_Pocket,
|
|
Wafer_Region,
|
|
Wafer_Scribe,
|
|
WaferPocket_Candela,
|
|
WaferPocket_Warp,
|
|
WaferPosition_CV,
|
|
WaferPosition_BV,
|
|
WaferPosition_Hall,
|
|
WaferPosition_PR,
|
|
Warp,
|
|
X_Coord,
|
|
XRD_2_Theta_Peak_002,
|
|
XRD_2_Theta_Peak_101,
|
|
XRD_2_Theta_Position,
|
|
XRD_2_Theta_Position_Si_1,
|
|
XRD_2_Theta_Position_Si_2,
|
|
XRD_2_Theta_Position_Si_3,
|
|
XRD_Peak_002_Intensity,
|
|
XRD_Peak_101_Intensity,
|
|
XRD_Weekly_AL_Center,
|
|
XRD_Weekly_Back_Barrier_Al_,
|
|
XRD_Weekly_Barrier_Al_,
|
|
XRD_Weekly_FWHM_002,
|
|
XRD_Weekly_FWHM_101,
|
|
XRD_Weekly_FWHM_105,
|
|
XRD_Weekly_Fringe_thick_0_0_,
|
|
XRD_Weekly_Fringe_thick_48_48_,
|
|
XRD_Weekly_Intensity,
|
|
XRD_Weekly_Super_Lattice_Al_,
|
|
XRD_Weekly_Super_Lattice_period,
|
|
XRD_Weekly_Super_Lattice_tks,
|
|
XRR_Thickness_nm_,
|
|
XRR_Thickness_nm_WTAVG,
|
|
Y_Coord,
|
|
YellowBand_Power_mW_,
|
|
YellowBand_V,
|
|
YellowBand_V_XY,
|
|
YellowBand_nm,
|
|
//pH,
|
|
Ag,
|
|
Al,
|
|
As,
|
|
Au,
|
|
B,
|
|
Ba,
|
|
Ca,
|
|
Ce,
|
|
Co,
|
|
Cr,
|
|
Cu,
|
|
Fe,
|
|
Ga,
|
|
Ge,
|
|
Hf,
|
|
K,
|
|
Li,
|
|
Mg,
|
|
Mn,
|
|
Mo,
|
|
Na,
|
|
Ni,
|
|
P,
|
|
Pb,
|
|
Sn,
|
|
Ta,
|
|
Ti,
|
|
W,
|
|
Y,
|
|
Zn
|
|
}
|