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2024-09-26

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EPI Process equipment types: Type Count 68020 ASM 10 HTR 4 68040 ASM 2 ASM+ 15 HTR 8 EPP EPP 8 RCM HTR 8 Grand Total 55

Mike Phares

Infineon Technologies Americas Corp. Software Engineer, Factory Equipment Integration Job ID: 29985 IFAM IT FI MES Mobile: +1 602 550-9220 Mike.Phares@infineon.com

From: Ojha Abinash (CSC FI FE PCS FDC) Abinash.Ojha@infineon.com Sent: Monday, September 16, 2024 6:03 AM To: Bischoff Christian (CSC FI FE PCS FDC) Christian.Bischoff@infineon.com Cc: Phares Mike (IT FI MES) Mike.Phares@infineon.com; Zulkefli Zaril Ezzuddin (CSC FI FE PCS) ZarilEzzuddin.Zulkefli@infineon.com Subject: RE: Mesa APC Data

Hello Christian,

Could you please align with Mike on below topics,

  • understand the status of FDC components versions in MESA o Master Control Service v1.0.2.1, PDX Service v1.0.2.1 and Receiver Service v1.0.3.1.
  • present & future of equipment connectivity to FDC in MESA (current number of connected equipments & plans) o GaN was close and was never used in production. o GaN fab shutdown in May of 2023. o GaN fab database has a few work-centers / equipment that need to be deleted to re-use database. Looking for support to delete data. o Si fab has one process and a few metrology operations to support the process. o For the one process there are 7 variations that Mesa is looking to add to fault detection. o Variation RCM-HTR is a PLC based communication and we have EAF and EDA configured but not verified. o Variations: 68020-ASM, 68020-HTR, 68040-ASM, 68040-ASM+ and 68040-HTR all use the same version of SECS/GEM messaging. This SECS/GEM is currently installed on two equipment with more to be purchased. Variation EPP-EPP has connectivity capabilities, but this will be evaluated last. o Metrology equipment is currently in InfinityQS SPC and have a multi-year plan to migrate to SPaCe SPC.
  • whether the FDC data access restriction still valid or MESA could be open for general access like other FE sites ? o MESA has both restricted parts and non-restricted, but all data is within restricted zone (EC Stealth).
  • Does it make sense to upgrade FDC to latest version o If support is available, I would push to remain close to Villachs version.

Based on your alignment, please come with a future proposal for FDC in MESA.

Best Regards Abinash