2024-11-26
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created: 2024-09-26T14:40:29.696Z
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type: note
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updated: 2024-09-26T14:40:43.731Z
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---
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# 2024-09-26
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Comments below in blue.
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EPI Process equipment types:
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Type Count
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68020
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ASM 10
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HTR 4
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68040
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ASM 2
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ASM+ 15
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HTR 8
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EPP
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EPP 8
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RCM
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HTR 8
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Grand Total 55
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Mike Phares
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Infineon Technologies Americas Corp.
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Software Engineer, Factory Equipment Integration
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Job ID: 29985
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IFAM IT FI MES
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Mobile: +1 602 550-9220
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Mike.Phares@infineon.com
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From: Ojha Abinash (CSC FI FE PCS FDC) <Abinash.Ojha@infineon.com>
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Sent: Monday, September 16, 2024 6:03 AM
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To: Bischoff Christian (CSC FI FE PCS FDC) <Christian.Bischoff@infineon.com>
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Cc: Phares Mike (IT FI MES) <Mike.Phares@infineon.com>; Zulkefli Zaril Ezzuddin (CSC FI FE PCS) <ZarilEzzuddin.Zulkefli@infineon.com>
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Subject: RE: Mesa APC Data
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Hello Christian,
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Could you please align with Mike on below topics,
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- understand the status of FDC components versions in MESA
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o Master Control Service v1.0.2.1, PDX Service v1.0.2.1 and Receiver Service v1.0.3.1.
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- present & future of equipment connectivity to FDC in MESA (current number of connected equipments & plans)
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o GaN was close and was never used in production.
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o GaN fab shutdown in May of 2023.
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o GaN fab database has a few work-centers / equipment that need to be deleted to re-use database.
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Looking for support to delete data.
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o Si fab has one process and a few metrology operations to support the process.
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o For the one process there are 7 variations that Mesa is looking to add to fault detection.
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o Variation RCM-HTR is a PLC based communication and we have EAF and EDA configured but not verified.
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o Variations: 68020-ASM, 68020-HTR, 68040-ASM, 68040-ASM+ and 68040-HTR all use the same version of SECS/GEM messaging.
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This SECS/GEM is currently installed on two equipment with more to be purchased.
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Variation EPP-EPP has connectivity capabilities, but this will be evaluated last.
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o Metrology equipment is currently in InfinityQS SPC and have a multi-year plan to migrate to SPaCe SPC.
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- whether the FDC data access restriction still valid or MESA could be open for general access like other FE sites ?
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o MESA has both restricted parts and non-restricted, but all data is within restricted zone (EC Stealth).
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- Does it make sense to upgrade FDC to latest version
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o If support is available, I would push to remain close to Villach’s version.
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Based on your alignment, please come with a future proposal for FDC in MESA.
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Best Regards
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Abinash
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